湖北民族学院学报（自然科学版）
湖北民族學院學報（自然科學版）
호북민족학원학보（자연과학판）
JOURNAL OF HUBEI INSTITUTE FOR NATIONALITIES（NATURAL SCIENCE EDITION）
2015年
2期
210-214
,共5页
机器视觉%ROI%芯片检测%Socket%图像处理
機器視覺%ROI%芯片檢測%Socket%圖像處理
궤기시각%ROI%심편검측%Socket%도상처리
machine vision%ROI%chip detection%socket%image processing
微电子工业中芯片表面外观检查需求已广泛存在，而人眼检测已愈来愈不能对应当前自动化、数字化的要求。当前已有图像处理技术应用在电子芯片外观检查上，但往往没有整套的系统，只是针对某个问题提出算法或解决方法。对此，提出了一个图像处理耦合机器视觉的芯片表面缺陷检查系统，并在软件硬件上集成实现。首先设计并搭建光源取像平台；然后基于轮廓定位芯片ROI区域，识别各种缺陷。最后，引入IO卡控制传动伺服、读码器记录芯片ID、基于Socket通信完成电算统计，从而完善整个系统。对比实验结果显示：与人工检测方法相比，所提方案具备更高的效率和精度。
微電子工業中芯片錶麵外觀檢查需求已廣汎存在，而人眼檢測已愈來愈不能對應噹前自動化、數字化的要求。噹前已有圖像處理技術應用在電子芯片外觀檢查上，但往往沒有整套的繫統，隻是針對某箇問題提齣算法或解決方法。對此，提齣瞭一箇圖像處理耦閤機器視覺的芯片錶麵缺陷檢查繫統，併在軟件硬件上集成實現。首先設計併搭建光源取像平檯；然後基于輪廓定位芯片ROI區域，識彆各種缺陷。最後，引入IO卡控製傳動伺服、讀碼器記錄芯片ID、基于Socket通信完成電算統計，從而完善整箇繫統。對比實驗結果顯示：與人工檢測方法相比，所提方案具備更高的效率和精度。
미전자공업중심편표면외관검사수구이엄범존재，이인안검측이유래유불능대응당전자동화、수자화적요구。당전이유도상처리기술응용재전자심편외관검사상，단왕왕몰유정투적계통，지시침대모개문제제출산법혹해결방법。대차，제출료일개도상처리우합궤기시각적심편표면결함검사계통，병재연건경건상집성실현。수선설계병탑건광원취상평태；연후기우륜곽정위심편ROI구역，식별각충결함。최후，인입IO잡공제전동사복、독마기기록심편ID、기우Socket통신완성전산통계，종이완선정개계통。대비실험결과현시：여인공검측방법상비，소제방안구비경고적효솔화정도。
In the microelectronics industry ,chip surface visual inspection requirements have been widely exist, while the traditional manual inspection methods are unable to correspond to the current require -ments of automation and digitization .The current application of image processing technology in electronic chip appearance inspection , but often does not have a set of system , just proposed algorithm or solutions to a problem.Therefore, this paper proposes a defective chip surface inspection system based on image processing and machine vision , and integrated implementation in software hardware .First build the cam-era, lens, light source such as hardware platform based on the image acquisition and image processing ;localization algorithm based on ROI chip area , defect identification .Finally ,introduced the IO card control drive servo , code reading device , recording chip ID based on Socket communication to complete the com-puterization of statistics , so as to improve the whole system .Finally,the mechanism of performance test , the results show that:compared with the manual method , this mechanism has higher efficiency and preci-sion.
