CAJ | 학술논문

超精密平台中使用压电陶瓷驱动器提供位移进给，采用集成应变式位移传感器的驱动器能够减小磁滞与蠕变特性，提高位移控制精度。设计并实现应变式位移传感器位移检测电路，介绍电阻应变式位移传感器位移测量原理；设计位移传感器电路，采用仪表放大器、同相衰减器与低通滤波器电路得到正比于位移变化的电压信号并输出；最后对位移传感器电路进行实验验证。实验结果表明：设计的传感器检测电路的电噪声峰‐峰值为0．390mV，输出电压分辨率小于0．6mV，对应的位移传感器的分辨可达1 nm ，能够有效提高压电陶瓷的精度。
초정밀평태중사용압전도자구동기제공위이진급，채용집성응변식위이전감기적구동기능구감소자체여연변특성，제고위이공제정도。설계병실현응변식위이전감기위이검측전로，개소전조응변식위이전감기위이측량원리；설계위이전감기전로，채용의표방대기、동상쇠감기여저통려파기전로득도정비우위이변화적전압신호병수출；최후대위이전감기전로진행실험험증。실험결과표명：설계적전감기검측전로적전조성봉‐봉치위0．390mV，수출전압분변솔소우0．6mV，대응적위이전감기적분변가체1 nm ，능구유효제고압전도자적정도。
Ultra‐precision platform uses piezoelectric ceramic drivers to provide displacement feed .Strain gauge displace‐ment sensor integrated drivers can be used to reduce the hysteresis and creep characteristics and improve precision of the displacement control .This paper designs and implements the displacement measuring circuit for the strain displacement sensor .The measurement principle of the resistance strain displacement sensor is introduced .Then ,the displacement sensor circuit is designed ,using instrumentation amplifier in‐phase attenuator and low‐pass filter to obtain and output voltage signal that proportional to displacement change .Finally ,the experiments of the displacement sensor circuit are carried out .The experiment results indicate that the electronic noise of the sensor circuit is 0 .390 mV (peak‐to‐peak val‐ue) ,and the resolution of the output voltage is less than 0 .6 mV ,the corresponding displacement resolution is up to 1 nm ,w hich can effectively improve the precision of the piezoelectric ceramic .