中国有色金属学报（英文版）
中國有色金屬學報（英文版）
중국유색금속학보（영문판）
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
2015年
6期
2009-2017
,共9页
化学气相沉积%金刚石%模板%铜基体%微通道
化學氣相沉積%金剛石%模闆%銅基體%微通道
화학기상침적%금강석%모판%동기체%미통도
chemical vapor deposition%diamond%template%Cu substrate%microchannel
主要活性基团(H, CH3·)的有效扩散与基体模板孔的深度限制了沟道或通道内金刚石的沉积。通过纳米金刚石悬浮液超声震荡加载籽晶，随后热丝化学气相沉积，在铜模板圆柱型微通道内成功制备出三维结构的金刚石膜。分别采用微区激光拉曼光谱和扫描电子显微镜表征金刚石膜，考察微通道深度对金刚石形貌、晶粒尺寸与膜生长速率的影响。结果显示：金刚石膜的质量和生长速率随微通道深度的增加而急剧下降，单个金刚石晶粒由发育完善、刻面清晰的晶粒逐渐转变为微米团簇，最后转变为球状纳米晶。为改善金刚石膜质量和提高生长速率，设计出一种气源强制输送热丝化学气相沉积装置。此外，对比分析无气源强制输送条件下金刚石的生长，并讨论气源强制输送的增强机理。
主要活性基糰(H, CH3·)的有效擴散與基體模闆孔的深度限製瞭溝道或通道內金剛石的沉積。通過納米金剛石懸浮液超聲震盪加載籽晶，隨後熱絲化學氣相沉積，在銅模闆圓柱型微通道內成功製備齣三維結構的金剛石膜。分彆採用微區激光拉曼光譜和掃描電子顯微鏡錶徵金剛石膜，攷察微通道深度對金剛石形貌、晶粒呎吋與膜生長速率的影響。結果顯示：金剛石膜的質量和生長速率隨微通道深度的增加而急劇下降，單箇金剛石晶粒由髮育完善、刻麵清晰的晶粒逐漸轉變為微米糰簇，最後轉變為毬狀納米晶。為改善金剛石膜質量和提高生長速率，設計齣一種氣源彊製輸送熱絲化學氣相沉積裝置。此外，對比分析無氣源彊製輸送條件下金剛石的生長，併討論氣源彊製輸送的增彊機理。
주요활성기단(H, CH3·)적유효확산여기체모판공적심도한제료구도혹통도내금강석적침적。통과납미금강석현부액초성진탕가재자정，수후열사화학기상침적，재동모판원주형미통도내성공제비출삼유결구적금강석막。분별채용미구격광랍만광보화소묘전자현미경표정금강석막，고찰미통도심도대금강석형모、정립척촌여막생장속솔적영향。결과현시：금강석막적질량화생장속솔수미통도심도적증가이급극하강，단개금강석정립유발육완선、각면청석적정립축점전변위미미단족，최후전변위구상납미정。위개선금강석막질량화제고생장속솔，설계출일충기원강제수송열사화학기상침적장치。차외，대비분석무기원강제수송조건하금강석적생장，병토론기원강제수송적증강궤리。
Deposition of diamond inside the trenches or microchannels by chemical vapor deposition (CVD) is limited by the diffusion efficiency of important radical species for diamond growth (H, CH3·) and the pore depth of the substrate template. By ultrasonic seeding with nanodiamond suspension, three-dimensional (3D) penetration structure diamond was successfully deposited in cylindrical microchannels of Cu template by hot-filament chemical vapor deposition. Micro-Raman spectroscopy and scanning electron microscopy (SEM) were used to characterize diamond film and the effects of microchannel depth on the morphology, grain size and growth rate of diamond film were comprehensively investigated. The results show that diamond quality and growth rate sharply decrease with the increase of the depth of cylindrical microchannel. Individual diamond grain develops gradually from faceted crystals into micrometer cluster, and finally to ballas-type nanocrystalline one. In order to modify the rapid decrease of diamond quality and growth rate, a new hot filament apparatus with a forced gas flow through Cu microchannels was designed. Furthermore, the growth of diamond film by new apparatus was compared with that without a forced gas flow, and the enhancement mechanism was discussed.
