CAJ | 학술논문

为了提高金刚石膜的透光性和技术参数的稳定性，对高功率直流电弧等离子体喷射法制备的金刚石膜中的黑色缺陷进行了研究。黑色缺陷可以分为点状、块状、纹理状和层状四种，用多种光学显微镜仔细观察、分析、测量、对比，研究发现：膜中粒状金属杂质、碳素体、孔洞、贯穿孪晶对光的遮挡和散射作用产生点状缺陷；晶柱间晶面倾角和走向的改变对光产生的散射和反射作用产生块状和条带状缺陷；膜中应力产生条纹缺陷；膜中不同层位导电元素对光的吸收产生层状缺陷。缺陷的存在严重影响金刚石膜的透光性、磨耗比、热导率和3点抗弯断裂强度的提高及稳定性。且本研究也提出了一些解决缺陷的方法。
위료제고금강석막적투광성화기술삼수적은정성，대고공솔직류전호등리자체분사법제비적금강석막중적흑색결함진행료연구。흑색결함가이분위점상、괴상、문리상화층상사충，용다충광학현미경자세관찰、분석、측량、대비，연구발현：막중립상금속잡질、탄소체、공동、관천련정대광적차당화산사작용산생점상결함；정주간정면경각화주향적개변대광산생적산사화반사작용산생괴상화조대상결함；막중응력산생조문결함；막중불동층위도전원소대광적흡수산생층상결함。결함적존재엄중영향금강석막적투광성、마모비、열도솔화3점항만단렬강도적제고급은정성。차본연구야제출료일사해결결함적방법。
In order to improve the transparence of diamond films and the stability of technical parameters,the black defects of diamond films prepared with DC Arc Plasma Jet CVD method were investigated?The black defects after observation,analysis,measurement and comparison using several kinds of optical microscopes were classified into punctiform,massive,texture and lamellar defects?The punctiform black defects were produced by masking and scattering of light caused by granular metal impurity,carbon mass,cavity and penetrating twins in diamond films?The massive and stripped defects were produced by reflection and scattering of light caused by changes of surface angle and orientation between the crystal columns?The texture defects were produced by the stress in the diamond films? The lamellar defects were produced by absorption of light caused by conductive elements at different horizons of diamond films?The lamellar defects were the main light-blocked defects of diamond films because the existence of lamellar defects severely influenced the improvement and stability of transparence,abrasion ratio,thermal conductivity and three-point bending fracture strength of diamond films?Some ways to solve the black defects had been put forward.