CAJ | 학술논문

非球面光学零件研抛加工后，易产生毛刺、尖点和高频划纹等现象。为了提高光学零件的表面质量，在分析了精密研抛机床加工特点的基础上，提出了基于粘滑运动和重复控制相结合的Z轴控制策略，建立粘滑运动控制系统模型。根据加入粘滑运动后Z轴特性，采用重复控制来提高控制精度；并通过仿真进行对比分析。结果表明，采用粘滑运动和重复控制相结合的控制策略，可以提高Z轴的跟踪精度，进而可以有效消除影响工件表面质量的不良因素。
비구면광학령건연포가공후，역산생모자、첨점화고빈화문등현상。위료제고광학령건적표면질량，재분석료정밀연포궤상가공특점적기출상，제출료기우점활운동화중복공제상결합적Z축공제책략，건립점활운동공제계통모형。근거가입점활운동후Z축특성，채용중복공제래제고공제정도；병통과방진진행대비분석。결과표명，채용점활운동화중복공제상결합적공제책략，가이제고Z축적근종정도，진이가이유효소제영향공건표면질량적불량인소。
It is easy to produce the phenomenon such as burrs, cusp and high frequency lines , after lapping and polishing the aspheric optical parts. In order to improve the surface quality of the optical parts, on the a-nalysis of the processing characteristic of the ultra-precise polishing machine, the control strategy of the Z axis based on combination of stick-slip motion and repetitive control is proposed and mathematical model of stick-slip motion is established. According to the characteristic of the Z axis with stick-slip motion, repetitive control is used to improve the control precision; and a comparison simulation is made to analysis. The re-sults show that the tracking accuracy can be improved by the control strategy of combinating stick-slip mo-tion and repetitive control. Furthermore, the harmful factors affecting the surface quality of the workpiece can be effectively eliminated.