电子显微学报
電子顯微學報
전자현미학보
JOURNAL OF CHINESE ELECTRON MICROSCOPY SOCIETY
2015年
4期
359-362
,共4页
透射电镜%薄膜材料%截面样品%制样%离子减薄
透射電鏡%薄膜材料%截麵樣品%製樣%離子減薄
투사전경%박막재료%절면양품%제양%리자감박
TEM%thin-film materials%cross-sectional specimen%specimen preparation%ion milling
针对薄膜材料透射电镜截面样品制备过程复杂、制样成功率低的问题，本文详细介绍了一种操作简单、实用性强的制备方法，采用该方法可以成功制备出脆性衬底上薄膜材料的TEM截面样品。
針對薄膜材料透射電鏡截麵樣品製備過程複雜、製樣成功率低的問題，本文詳細介紹瞭一種操作簡單、實用性彊的製備方法，採用該方法可以成功製備齣脆性襯底上薄膜材料的TEM截麵樣品。
침대박막재료투사전경절면양품제비과정복잡、제양성공솔저적문제，본문상세개소료일충조작간단、실용성강적제비방법，채용해방법가이성공제비출취성츤저상박막재료적TEM절면양품。
Preparing cross?sectional transmission electron microscope ( TEM) specimens for thin?film materials is very complex and its success rate is very low. A preparation method with a simple operation and a high practicality was introduced. By using this method it could succeed in preparing cross?sectional TEM specimens for thin?film materials grown on brittle substrate.
