传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2015年
8期
119-120,130
,共3页
张娜%唐慧%梁峭%刘剑%孙海玮
張娜%唐慧%樑峭%劉劍%孫海瑋
장나%당혜%량초%류검%손해위
压阻%TO-8%硅凝胶%传感器
壓阻%TO-8%硅凝膠%傳感器
압조%TO-8%규응효%전감기
piezoresistive%TO-8%silicon gel%sensor
介绍了一种耐低温气象传感器的制作方法，该传感器应用于航天环控系统，采用扩散硅压阻芯片、TO—8管座装配、硅凝胶封装，体积小、质量轻，对外界恶劣环境适应性强，使用温区在－55～95℃。测试结果显示：该传感器常温静态、高低温性能良好，低温性能甚至比国际产品更有优越性。制作工艺步骤简单、成本低，具有很高的实用价值。
介紹瞭一種耐低溫氣象傳感器的製作方法，該傳感器應用于航天環控繫統，採用擴散硅壓阻芯片、TO—8管座裝配、硅凝膠封裝，體積小、質量輕，對外界噁劣環境適應性彊，使用溫區在－55～95℃。測試結果顯示：該傳感器常溫靜態、高低溫性能良好，低溫性能甚至比國際產品更有優越性。製作工藝步驟簡單、成本低，具有很高的實用價值。
개소료일충내저온기상전감기적제작방법，해전감기응용우항천배공계통，채용확산규압조심편、TO—8관좌장배、규응효봉장，체적소、질량경，대외계악렬배경괄응성강，사용온구재－55～95℃。측시결과현시：해전감기상온정태、고저온성능량호，저온성능심지비국제산품경유우월성。제작공예보취간단、성본저，구유흔고적실용개치。
Introduce method for fabrication of low temperature resistant meteorological sensor,this sensor is used in space environment control system,diffused silicon piezoresistive chip,TO—8 socket and encapsulation with silicon gel,it is small and light,it has strong ability to adapt to harsh environment,and temperature range of-55~95℃. Test results show that the sensor has good performance of high and low temperature at room temperature static state,even more superior than international products. Fabrication process is simple,low cost,and it has very high practical value.
