CAJ | 학술논문

研制了一种基于薄膜体声波谐振器（ FBAR）的生物免疫球蛋白传感器，该FBAR采用AlN作为压电层，3对Ti/W金属层作为布拉格声学反射层，工作频率为2.047 GHz，回波损耗为－32 dB。利用自组装膜法修饰顶部金电极敏感区域。测试了免疫球蛋白G抗体和抗原的特异性结合前后传感器的指标变化。结果得到传感器的Q值和灵敏度分别达到846，3.38 kHz·cm2/ng，远高于广泛使用的石英晶体微天平（ QCM），具有广阔的应用前景。
연제료일충기우박막체성파해진기（ FBAR）적생물면역구단백전감기，해FBAR채용AlN작위압전층，3대Ti/W금속층작위포랍격성학반사층，공작빈솔위2.047 GHz，회파손모위－32 dB。이용자조장막법수식정부금전겁민감구역。측시료면역구단백G항체화항원적특이성결합전후전감기적지표변화。결과득도전감기적Q치화령민도분별체도846，3.38 kHz·cm2/ng，원고우엄범사용적석영정체미천평（ QCM），구유엄활적응용전경。
An immune globulin( IG)sensor based on thin film bulk acoustic resonator( FBAR)is presented, which works at 2. 047 GHz with -32 dB return loss,consisting of an AlN piezoelectric stack and three pairs of Ti/W Bragg reflector. Self-assembled monolayers( SAMs )are applied to modify the top Au electrode sensitive area. Index changes of sensor before and after combination of antigen and antibody of IG are test. The Q factor of sensor is calculated as high as 846 and the sensitivity as a biosensor can reach 3. 38 kHz·cm2/ng which much higher than that of QCM. Through the antibody detection experiment,the FBAR is proved to have the potential of exhibiting a more crucial effect in the biosensor field.