传感器与微系统
傳感器與微繫統
전감기여미계통
TRANSDUCER AND MICROSYSTEM TECHNOLOGY
2015年
8期
16-18
,共3页
王任鑫%刘源%张国军%刘俊%薛晨阳%张文栋
王任鑫%劉源%張國軍%劉俊%薛晨暘%張文棟
왕임흠%류원%장국군%류준%설신양%장문동
Parylene%宽频带%微机电系统%矢量水听器
Parylene%寬頻帶%微機電繫統%矢量水聽器
Parylene%관빈대%미궤전계통%시량수은기
Parylene%broadband%MEMS%vector hydrophone
针对目前水听器的聚氨酯封装所导致的窄频带问题，提出一种新的高疏水Parylene薄膜无透声帽封装矢量水听器，即利用Parylene薄膜的淀积高保形性、低渗透性和高绝缘性实现无透声帽封装，解决透声帽带来共振峰引入问题，拓宽水听器的频带。实验结果表明：水听器的共振峰由450 Hz提高到了1400 Hz。
針對目前水聽器的聚氨酯封裝所導緻的窄頻帶問題，提齣一種新的高疏水Parylene薄膜無透聲帽封裝矢量水聽器，即利用Parylene薄膜的澱積高保形性、低滲透性和高絕緣性實現無透聲帽封裝，解決透聲帽帶來共振峰引入問題，拓寬水聽器的頻帶。實驗結果錶明：水聽器的共振峰由450 Hz提高到瞭1400 Hz。
침대목전수은기적취안지봉장소도치적착빈대문제，제출일충신적고소수Parylene박막무투성모봉장시량수은기，즉이용Parylene박막적정적고보형성、저삼투성화고절연성실현무투성모봉장，해결투성모대래공진봉인입문제，탁관수은기적빈대。실험결과표명：수은기적공진봉유450 Hz제고도료1400 Hz。
Aiming at problem of narrow bandwidth caused by Polyurethane encapsulation of vector hydrophone, propose a kind of Parylene encapsulation,using properties of high shape preserving,low permeability and high insulation that Parylene membrane has,to realize sound transparent capless encapsulation and solve the problem of resonant peak introducing caused by sound transparent,broaden frequency band. Tests show that resonance frequency is increased from 450 Hz to 1 400 Hz.
