CAJ | 학술논문

SiF4用于作光导纤维、太阳能电池等电子工业等领域时需要有较高纯度。本文重点介绍了SiF4的杂质元素分析，用吸收剂吸收后，除去硅和氟元素后测定其他元素。为了更准确的测量，我们采用电感耦合等离子体发射光谱法同时测定SiF4气体中可能存在的铝、钙、碳、铁、镍、铬、铜、锌、磷、硼、铝、砷、镓、锑、铟等微量金属元素，确定杂质成分。并且同时检测空白样，对比杂质成分，进行分析。
SiF4용우작광도섬유、태양능전지등전자공업등영역시수요유교고순도。본문중점개소료SiF4적잡질원소분석，용흡수제흡수후，제거규화불원소후측정기타원소。위료경준학적측량，아문채용전감우합등리자체발사광보법동시측정SiF4기체중가능존재적려、개、탄、철、얼、락、동、자、린、붕、려、신、가、제、인등미량금속원소，학정잡질성분。병차동시검측공백양，대비잡질성분，진행분석。
SiF4 used in the field of optical fiber, solar cells and other electronic industries need to have a higher purity.The impurity element analysis of SiF4 was mainly introduced, and after absorbing the absorbent, other elements we removed after removal of silicon and fluorine.For more accurate measurements, we adopted inductively coupled plasma emission spectrometry for the simultaneous determination of trace elements in SiF4 gas may exist in aluminum, calcium, carbon, iron, nickel, chromium, copper, zinc, phosphorus, boron, aluminium, arsenic, gallium, antimony and indium, impurity composition was determined.At the same time, the blank sample was detected, the impurities was compared and analyzed.