CAJ | 학술논문

多孔硅由于其制备方法简单、拥有极大的内表面积、广泛的孔径尺寸、可控的表面改性以及与传统硅集成技术兼容等特点，成为传感器件中理想的敏感材料。简述了多孔硅电化学传感器和光学传感器的研究进展，包括多孔硅湿度传感器、多孔硅气敏传感器、多孔硅有机蒸气传感器、多孔硅生物传感器。最后指出了阻碍多孔硅基传感器商业化的影响因素，并展望了多孔硅传感器的发展方向。
다공규유우기제비방법간단、옹유겁대적내표면적、엄범적공경척촌、가공적표면개성이급여전통규집성기술겸용등특점，성위전감기건중이상적민감재료。간술료다공규전화학전감기화광학전감기적연구진전，포괄다공규습도전감기、다공규기민전감기、다공규유궤증기전감기、다공규생물전감기。최후지출료조애다공규기전감기상업화적영향인소，병전망료다공규전감기적발전방향。
The motivation of using porous silicon (PS)as a sensing material relates to ease of fabrication,large internal surface,wide range of accessible and adjustable pore size,controllable surface modification and compatibility with current silicon-based technologies.Based on PS materials,the research progress of PS electrochemical sensors and optical sensors are introduced,including PS humidity sensors,PS gas sensors,PS organic vapor sensors,PS bio-logical sensors.Lastly,concluding remarks about existing challenges that hinder the commercial use of the material are highlighted,and pospective development directions of PS sensors are suggested.