CAJ | 학술논문

目前，硅压阻式压力/压差传感器在伺服系统上得到广泛的应用。但是由于其内部压力敏感芯体的封装结构为薄膜隔离式，其内部硅油的密封性是伺服系统配套传感器长期带压贮存的软肋。根据伺服系统对压力/压差传感器的需求，研制了几种无介质压阻式压力/压差传感器，其内部避免了硅油介质传递压力，保证了传感器的可靠性。通过传感器原理结构的研究，以及其性能指标的测试和对比，为伺服系统配套传感器提供了新的选择。
목전，규압조식압력/압차전감기재사복계통상득도엄범적응용。단시유우기내부압력민감심체적봉장결구위박막격리식，기내부규유적밀봉성시사복계통배투전감기장기대압저존적연륵。근거사복계통대압력/압차전감기적수구，연제료궤충무개질압조식압력/압차전감기，기내부피면료규유개질전체압력，보증료전감기적가고성。통과전감기원리결구적연구，이급기성능지표적측시화대비，위사복계통배투전감기제공료신적선택。
At present, silicon piezoresistive pressure/differential pressure sensor is widely used in servo system. But because the package structure of sensor internal pressure sensitive core is thin-film iso-lated, the tightness of silicone oil is the weakness of servo system with sensor for long-term pressure-bear-ing storage. According to the requirement of the servo system of pressure/differential pressure sensor, several piezoresistive pressure/differential pressure sensors without medium are developed, interior of sen-sor the silicone oil medium to transfer the pressure is avoid, and the reliability of sensor is ensured. Through research of sensor structure, and its performance test and contrast, a new choose for servo system with sensor is provided.