CAJ | 학술논문

TiN具有硬度高、韧性好、摩擦系数小、化学性能稳定等优点，广泛应用于刀具、装饰、表面防护等领域。目前制备TiN涂层的方法有很多，如气相沉积、热喷涂、电镀等，反应等离子喷涂则是最常用的金属-陶瓷复合涂层制备方法。概述了反应等离子喷涂技术的基本原理和分类，包括反应等离子喷涂涂层的形成过程及工艺的优缺点。综述了反应等离子喷涂TiN涂层的喷涂工艺及性能的研究进展，包括涂层的制备方法(原位合成法、烧结破碎法)和性能特点，重点分析了涂层的力学性能、耐磨损性能、耐腐蚀性能，并提出了可以依靠热处理工艺或封孔技术来提高涂层的耐腐蚀性能。依据实验和查阅的文献，反应等离子喷涂结合了自蔓延高温合成技术和等离子喷涂技术，可以制备质量优良的厚 TiN 涂层(>500μm)，是一种新型的低成本涂层制备技术，但是反应等离子喷涂制备TiN涂层存在孔隙率较高(5%~10%)、结合强度较低(<50 MPa)的问题。分别从技术、设备、工艺、后处理四个方面总结了改善涂层质量的相应措施，展望了今后的研究发展方向。
TiN구유경도고、인성호、마찰계수소、화학성능은정등우점，엄범응용우도구、장식、표면방호등영역。목전제비TiN도층적방법유흔다，여기상침적、열분도、전도등，반응등리자분도칙시최상용적금속-도자복합도층제비방법。개술료반응등리자분도기술적기본원리화분류，포괄반응등리자분도도층적형성과정급공예적우결점。종술료반응등리자분도TiN도층적분도공예급성능적연구진전，포괄도층적제비방법(원위합성법、소결파쇄법)화성능특점，중점분석료도층적역학성능、내마손성능、내부식성능，병제출료가이의고열처리공예혹봉공기술래제고도층적내부식성능。의거실험화사열적문헌，반응등리자분도결합료자만연고온합성기술화등리자분도기술，가이제비질량우량적후 TiN 도층(>500μm)，시일충신형적저성본도층제비기술，단시반응등리자분도제비TiN도층존재공극솔교고(5%~10%)、결합강도교저(<50 MPa)적문제。분별종기술、설비、공예、후처리사개방면총결료개선도층질량적상응조시，전망료금후적연구발전방향。
ABSTRACT:TiN has excellent properties such as high hardness, good toughness, low friction coefficient, chemical stability, and has been used in cutting tools, decorations, surface protection. There are many methods to fabricate TiN coatings, such as vapor deposition, thermal spraying, electroplating, and reactive plasma spraying is a common way to prepare metal-ceramic composite coatings. The basic principles and types of reactive plasma spraying technology, including the process of coating, the advantages and the disadvantages, were reviewed, and the recent progresses of reactive plasma sprayed TiN coatings, including fabrication ( in-situ synthesis, sinter crushing) and properties were introduced. In addition, the mechanical properties, wear and corrosion re-sistance were analyzed. And the methods of heat treatment and sealing are suggested to improve the corrosion resistance of the coa-ting. According to the experiments and literatures, reactive plasma spraying is a novel technique with low production cost which combines the advantages of self-propagating high-temperature synthesis and plasma spraying. Thick TiN coatings ( over 500 μm) with high quality can be prepared via reactive plasma spraying. However, the reactive plasma sprayed TiN coatings also have prob-lems such as high porosity (5% to 10%) and low adhesion (<50 MPa). The measures to improve the quality of TiN coatings were summarized from the aspects of technology, facility, craft and post processing, and the trend of development was prospected.