CAJ | 학술논문

VO2在68℃左右时发生半导体—金属态的固－固相变，且相变前后光学和电学性能发生突变，该特性使 VO2薄膜在红外智能窗、电致光开关器件、激光防护材料、自适应隐身材料等领域受到广泛研究。制备 VO2薄膜的方法包括磁控溅射法、脉冲激光沉积法、溶胶－凝胶法、金属热蒸发法等，理想的制备参数是当前研究的重点。本文总结了近年来 VO2在制备方法和应用发展上的研究现状，对进一步深入研究 VO2薄膜的各项性能及应用具有借鉴意义。
VO2재68℃좌우시발생반도체—금속태적고－고상변，차상변전후광학화전학성능발생돌변，해특성사 VO2박막재홍외지능창、전치광개관기건、격광방호재료、자괄응은신재료등영역수도엄범연구。제비 VO2박막적방법포괄자공천사법、맥충격광침적법、용효－응효법、금속열증발법등，이상적제비삼수시당전연구적중점。본문총결료근년래 VO2재제비방법화응용발전상적연구현상，대진일보심입연구 VO2박막적각항성능급응용구유차감의의。
VO2 will change from semiconductor to metal phase,which is a solid to solid phase -transition,when its temperature is about 68 ℃,and its optical and electrical properties will mutate after the phase -transition.This fea-ture makes the VO2 thin films to be widely studied in fields of infrared smart window,optical switch devices,laser pro-tective materials,adaptive stealth materials,etc.Preparation methods of VO2 thin films include magnetron sputtering, pulsed laser deposition,sol -gel,metal thermal evaporation method,etc.The ideal preparation parameters are the fo-cus of current research.Preparation methods and application status of VO2 thin film are summarized,which gives refer-ence for further studies in the properties and applications of VO2 thin film.