城市建设理论研究（电子版）
城市建設理論研究（電子版）
성시건설이론연구（전자판）
ChengShi Jianshe LiLun Yan Jiu
2015年
22期
2272-2275
,共4页
铸渗技术%多晶硅%铸渗层
鑄滲技術%多晶硅%鑄滲層
주삼기술%다정규%주삼층
cast infiltration technology%polysilicon%cast infiltration layer
多晶硅生产的合成工序中，输送氯硅烷的急冷塔循环泵两到三个月就要进行一次大修，更换耐磨盘、叶轮、诱导轮和蜗壳等备件，这些备件主要是因为表面磨损和腐蚀严重，导致泵的压力与流量达不到工艺要求。一般情况下，很难找到一种备件能同时满足相应的表面和整体性能，若利用铸渗技术，就地取材，将多晶硅粉末铸渗在易磨损、易腐蚀备件的表面，形成一种保护层，会大幅度降低屏蔽泵备件更换的次数，延长其使用寿命，为多晶硅的生产起到降本增效的积极作用。
多晶硅生產的閤成工序中，輸送氯硅烷的急冷塔循環泵兩到三箇月就要進行一次大脩，更換耐磨盤、葉輪、誘導輪和蝸殼等備件，這些備件主要是因為錶麵磨損和腐蝕嚴重，導緻泵的壓力與流量達不到工藝要求。一般情況下，很難找到一種備件能同時滿足相應的錶麵和整體性能，若利用鑄滲技術，就地取材，將多晶硅粉末鑄滲在易磨損、易腐蝕備件的錶麵，形成一種保護層，會大幅度降低屏蔽泵備件更換的次數，延長其使用壽命，為多晶硅的生產起到降本增效的積極作用。
다정규생산적합성공서중，수송록규완적급랭탑순배빙량도삼개월취요진행일차대수，경환내마반、협륜、유도륜화와각등비건，저사비건주요시인위표면마손화부식엄중，도치빙적압력여류량체불도공예요구。일반정황하，흔난조도일충비건능동시만족상응적표면화정체성능，약이용주삼기술，취지취재，장다정규분말주삼재역마손、역부식비건적표면，형성일충보호층，회대폭도강저병폐빙비건경환적차수，연장기사용수명，위다정규적생산기도강본증효적적겁작용。
polysilicon production of synthetic process of conveying chlorosilane emergency cooling tower circulating pump for two to three months to carry out a major overhaul, replacement of spare parts abrasion wheel, impel er, induced wheel and a spiral casing etc., these spare parts is mainly because of the severe surface wear and corrosion, resulting in the pressure and flow of pump fails to meet the requirements of the process. Under normal circumstances, it is difficult to find a spare parts can meet the corresponding surface and overal performance at the same time, if the use of cast infiltration technology, the use of local materials, wil polysilicon powder infiltration in easy to wear, easy to corrosion parts of the surface, forming a layer of protection, wil greatly reduce the shielding pump spare parts replacement times, prolong the service life, for polysilicon production down to the positive role of the ef iciency and the quality and efficiency.
