自动化仪表
自動化儀錶
자동화의표
PROCESS AUTOMATION INSTRUMENTATION
2015年
8期
89-92
,共4页
透射电子显微镜(TEM)%物镜%烘烤%真空获得%热敏电阻
透射電子顯微鏡(TEM)%物鏡%烘烤%真空穫得%熱敏電阻
투사전자현미경(TEM)%물경%홍고%진공획득%열민전조
Transmission electron microscopy(TEM)%Objective lens%Baking%Vacuum acquisition%Thermistor
研究了一种烘烤控制方法在透射电子显微镜中的应用，通过分析透射电子显微镜获得高真空的方法，提出引入物镜烘烤的必要性。对物镜烘烤的控制特点进行了详细分析，并对控制电路进行了仿真分析。经过反复测试验证，该物镜烘烤控制方法符合透射电子显微镜获得高真空工艺的控制要求。
研究瞭一種烘烤控製方法在透射電子顯微鏡中的應用，通過分析透射電子顯微鏡穫得高真空的方法，提齣引入物鏡烘烤的必要性。對物鏡烘烤的控製特點進行瞭詳細分析，併對控製電路進行瞭倣真分析。經過反複測試驗證，該物鏡烘烤控製方法符閤透射電子顯微鏡穫得高真空工藝的控製要求。
연구료일충홍고공제방법재투사전자현미경중적응용，통과분석투사전자현미경획득고진공적방법，제출인입물경홍고적필요성。대물경홍고적공제특점진행료상세분석，병대공제전로진행료방진분석。경과반복측시험증，해물경홍고공제방법부합투사전자현미경획득고진공공예적공제요구。
The application of baking control method in transmission electron microscopy ( TEM) is researched, through analyzing the method of obtaining high vacuum in TEM, the necessity of objective lens baking is introduced. The control features of objective lens baking are analyzed in detail, the control circuitry is simulated and analyzed. Repeated testing and certification show that the objective lens baking control method conforms the control requirement of acquiring high vacuum technological process of TEM.
