仪表技术与传感器
儀錶技術與傳感器
의표기술여전감기
INSTRUMENT TECHNIQUE AND SENSOR
2015年
8期
1-3,6
,共4页
穆林枫%张文栋%何常德%张睿%宋金龙%薛晨阳
穆林楓%張文棟%何常德%張睿%宋金龍%薛晨暘
목림풍%장문동%하상덕%장예%송금룡%설신양
微电容超声传感器%寄生电容%电容变化率%跨阻检测电路%系统测试
微電容超聲傳感器%寄生電容%電容變化率%跨阻檢測電路%繫統測試
미전용초성전감기%기생전용%전용변화솔%과조검측전로%계통측시
CMUT%parasitic capacitance%capacitance change rate%transimpedance detection circuit%system test
针对现有微电容超声传感器( CMUT)寄生电容大的问题,采用绝缘技术将振动薄膜与上电极金属完全隔离的方法,避免了掺杂效应的发生,从而减小了寄生电容。文中以电容变化率为主线,分别对微传感器和跨阻检测电路的电容变化率进行了计算和仿真,建立了传感器与电路检测的通道,并通过水下测试系统的搭建,对其进行实验验证。测试结果表明,实际输出电压的值为0.8 V,与理论计算值0.61 V相近,从而验证了CMUT的可用性及其测试系统的可行性。
針對現有微電容超聲傳感器( CMUT)寄生電容大的問題,採用絕緣技術將振動薄膜與上電極金屬完全隔離的方法,避免瞭摻雜效應的髮生,從而減小瞭寄生電容。文中以電容變化率為主線,分彆對微傳感器和跨阻檢測電路的電容變化率進行瞭計算和倣真,建立瞭傳感器與電路檢測的通道,併通過水下測試繫統的搭建,對其進行實驗驗證。測試結果錶明,實際輸齣電壓的值為0.8 V,與理論計算值0.61 V相近,從而驗證瞭CMUT的可用性及其測試繫統的可行性。
침대현유미전용초성전감기( CMUT)기생전용대적문제,채용절연기술장진동박막여상전겁금속완전격리적방법,피면료참잡효응적발생,종이감소료기생전용。문중이전용변화솔위주선,분별대미전감기화과조검측전로적전용변화솔진행료계산화방진,건립료전감기여전로검측적통도,병통과수하측시계통적탑건,대기진행실험험증。측시결과표명,실제수출전압적치위0.8 V,여이론계산치0.61 V상근,종이험증료CMUT적가용성급기측시계통적가행성。
Due to the problem of higher parasitic of Capacitance Micro-machined Ultrasonic Transducer ( CMUT),isolation technology was adopted to apart the vibrating membrane from top electrode,which avoided the effect of doping.The capacitance change rate was the main line of the paper,the calculation and simulation of micro transducer and detection circuit were presented, which built the road between micro transducer and detection circuit.Test system underwater was also conducted.The test results show that the actual output voltage is 0.8 V,and the theory value is 0.61 V,which demonstrates the applicability of CMUT and the feasibility of test system.