CAJ | 학술논문

采用数值模拟的方法开展光刻物镜镜组的跌落分析，结合数值寻优的方式，以光刻物镜所能承受的最大加速度为约束条件确定缓冲结构的尺寸参数，并通过跌落实验验证数值仿真的准确性与可靠性，进而指导超精密光刻物镜缓冲包装的参数设计。利用此方法对质量为10 kg、镜片口径为160 mm，径厚比为8．89光刻物镜镜组进行缓冲结构设计，实验结果表明，其从10 cm 高度跌落后最大加速度为4．4 g ，面形变化仅为0．36 nm，满足超精密光学设备的动力学指标要求。
채용수치모의적방법개전광각물경경조적질락분석，결합수치심우적방식，이광각물경소능승수적최대가속도위약속조건학정완충결구적척촌삼수，병통과질락실험험증수치방진적준학성여가고성，진이지도초정밀광각물경완충포장적삼수설계。이용차방법대질량위10 kg、경편구경위160 mm，경후비위8．89광각물경경조진행완충결구설계，실험결과표명，기종10 cm 고도질락후최대가속도위4．4 g ，면형변화부위0．36 nm，만족초정밀광학설비적동역학지표요구。
In this paper,drop numerical simu-lations are used before conducting analysis of li-thography lenses.Based on the requirement of the maximum acceleration,the cushion structure di-mensions are confirmed by the optimization solu-tion.The experimental results demonstrate the ac-curacy and reliability of the numerical simulation. Using this method,the cushion packaging of li-thography lens is designed.The mass of the lens is 10 kg,the aperture is 160mm,the radius thick-ness ratio is 8.89.The experiment results demon-strate that the maximum acceleration is 4.4g and the lens surface changes only 0.36 nm when the lens is dropped from 10 cm.The cushion packa-ging design meets the dynamic indicators.