CAJ | 학술논문

传感器的零点温度漂移、灵敏度温度漂移和非线性误差是影响传感器性能的主要因素，如何能使该类误差得到有效补偿对于提高其性能有重要意义。提出了基于三次样条曲线插值的温度补偿方法，改进了传统三次样条曲线插值的补偿方法，分别对传感器的零点、灵敏度以及非线性进行补偿，用这种方法对测压范围为1.0140×105 Pa～3.0140×105 Pa，温度范围为-20℃～+60℃的硅压阻式压力传感器的实验标定结果进行了温度补偿。通过比较传统三次样条插值补偿后的传感器输出信号，验证了使用改进后的三次样条曲线插值法的补偿效果更好。这种方法为高精度压力传感器的温度补偿提供了一种有价值的理论依据。
전감기적영점온도표이、령민도온도표이화비선성오차시영향전감기성능적주요인소，여하능사해류오차득도유효보상대우제고기성능유중요의의。제출료기우삼차양조곡선삽치적온도보상방법，개진료전통삼차양조곡선삽치적보상방법，분별대전감기적영점、령민도이급비선성진행보상，용저충방법대측압범위위1.0140×105 Pa～3.0140×105 Pa，온도범위위-20℃～+60℃적규압조식압력전감기적실험표정결과진행료온도보상。통과비교전통삼차양조삽치보상후적전감기수출신호，험증료사용개진후적삼차양조곡선삽치법적보상효과경호。저충방법위고정도압력전감기적온도보상제공료일충유개치적이론의거。
The thermal zero drift,the thermal sensitivity drift and non-linear error of piezoresistive pressure sensor are the main factors of affecting the performance of sensors. So how to effectively compensate this kinds of errors to improve its performance is significative.The temperature compensation method based on the interpolation of third or?der splines was presented. The traditional compensation method based on the interpolation of third order splines was improved,to compensate zero drift,sensitivity drift and non-linear error respectively. This method was applied for the temperature compensation of the experimental results of piezoresistive pressure sensor. The mea suring range of the pressure sensor is 1.014 0 × 105 Pa~3.014 0 × 105 Pa and the applied temperature range is-20 ℃~+60℃. By comparing the output signals by the sensor based on the traditional interpolation of third order splines, the effect about improved compensation method based on the interpolation of third order splines was better.The pro?posed method can provide a valuable theoretical reference for the temperature compensation of the high precision pressure sensors.