CAJ | 학술논문

为了满足无线传感网络节点对供电电源的自供电、低功耗、持续稳定供电的要求，研究了一种可以将环境中机械能转化为电能的MEMS压电-磁电复合式振动驱动微能源，结合压电转换与磁电转换把振动能转换为电能。建立数学模型，用有限分析软件Ansys12.0对不同尺寸的四悬臂梁-中心质量块结构进行力学特性分析，并对加工出的器件进行性能测试。测试结果表明，谐振频率为290Hz下，器件输出电压峰峰值随振动加速度的增加呈线性增加，1 m/s2和6 m/s2激励下有效输出电压分别为61mV和324mV，有望为无线网络传感节点提供性能高、寿命长、自供给的供电电源。
위료만족무선전감망락절점대공전전원적자공전、저공모、지속은정공전적요구，연구료일충가이장배경중궤계능전화위전능적MEMS압전-자전복합식진동구동미능원，결합압전전환여자전전환파진동능전환위전능。건립수학모형，용유한분석연건Ansys12.0대불동척촌적사현비량-중심질량괴결구진행역학특성분석，병대가공출적기건진행성능측시。측시결과표명，해진빈솔위290Hz하，기건수출전압봉봉치수진동가속도적증가정선성증가，1 m/s2화6 m/s2격려하유효수출전압분별위61mV화324mV，유망위무선망락전감절점제공성능고、수명장、자공급적공전전원。
A MEMS vibration micro-power based on piezoelectric and electromagnetic hybrid Effect was proposed, which is an important developing for the wireless sensor network node power supply from the power supply,low pow?er consumption,stable power supply. The micro-power combines the advantages of the piezoelectric and electromag?netic which is the transformation of the vibration energy into electric energy. The calibration method and finite ele?ment method for the accelerometer of different sizes was proposed to present the experimental results. The experi?mental results show that the maximum effective output voltage of the device is 61 mV and 324 mV under 1 m/s2和6 m/s2 and the resonant of 290 Hz. And it is expected to solve the high performance,long service life,power supply problem of wireless sensor network nodes.