CAJ | 학술논문

纳米时栅利用正交变化电场构建的运动参考系进行测量，激励信号精度直接影响运动参考系匀速性，进而影响测量精度。针对纳米时栅需要高精度激励信号的要求，设计了一种采用闭环控制结构的高精度激励信号源，该信号源采用单片FPGA实现总体控制，完成采集控制、数据处理和波形数据产生等功能，利用16位高精度数据转换器构建信号发生电路及反馈电路，保证了对信号的精确控制。测试结果表明：输出正弦信号幅值精度为0.01%，相位精度为0.1%，并将纳米时栅原始精度从1.4μm提高至0.9μm。
납미시책이용정교변화전장구건적운동삼고계진행측량，격려신호정도직접영향운동삼고계균속성，진이영향측량정도。침대납미시책수요고정도격려신호적요구，설계료일충채용폐배공제결구적고정도격려신호원，해신호원채용단편FPGA실현총체공제，완성채집공제、수거처리화파형수거산생등공능，이용16위고정도수거전환기구건신호발생전로급반궤전로，보증료대신호적정학공제。측시결과표명：수출정현신호폭치정도위0.01%，상위정도위0.1%，병장납미시책원시정도종1.4μm제고지0.9μm。
Nanometer time grating makes measurement with moving reference frame constructed by alternating elec?tric field. Precision of the excitation directly affects the uniform motion of the reference frame,and thus influences the accuracy of measurement. In order to meet the requirement of high precision excitation,a new signal source adopting closed loop control was designed. FPGA was used to complete overall control,including acquisition con?trol,data processing and waveform data generating. Signal generating circuit and feedback circuit were constructed with 16-bit D/A and A/D converters,therefore the precise control of signals was improved a lot. The test results show that the precision of the signal amplitude is 0.01%and the phase precision is 0.1%,and the original precision of nanometer time grating was improved from 1.4μm to 0.9μm.