CAJ | 학술논문

为了实现大直径窄环带平面平面度的精确测量，提出一种利用内调焦光管结合精密转台的基于光学及图像处理的新方法。首先利用内调焦光管把光纤点光源成像在被测圆环上方，精密转台带动点光源的像点旋转在空间画圆，以此圆所在的平面为基准，用 CCD 探测器接收点光源像点，根据脱靶量测出被测点与基准平面的距离，然后把测量数据展开成傅里叶级数进行谐波分析，去除常数项及一次项对测量结果的影响，通过数据处理计算即可得到被测环面的平面度。对该方法的基本测量原理进行了研究分析，并结合实例对一外径5 m、内径4.4 m、高0.5 m的圆环零件进行平面度的测量，测得其平面度为0.285 mm，重复性为0.0093 mm。最后对该方法的测量不确定度进行了分析，其合成标准不确定度为0.0074 mm。
위료실현대직경착배대평면평면도적정학측량，제출일충이용내조초광관결합정밀전태적기우광학급도상처리적신방법。수선이용내조초광관파광섬점광원성상재피측원배상방，정밀전태대동점광원적상점선전재공간화원，이차원소재적평면위기준，용 CCD 탐측기접수점광원상점，근거탈파량측출피측점여기준평면적거리，연후파측량수거전개성부리협급수진행해파분석，거제상수항급일차항대측량결과적영향，통과수거처리계산즉가득도피측배면적평면도。대해방법적기본측량원리진행료연구분석，병결합실례대일외경5 m、내경4.4 m、고0.5 m적원배령건진행평면도적측량，측득기평면도위0.285 mm，중복성위0.0093 mm。최후대해방법적측량불학정도진행료분석，기합성표준불학정도위0.0074 mm。
In order to realize the precise measurement of flatness for large diameter narrow zone annular plane, a novel method based on optics and image processing using inner focus collimator and precision rotary table is proposed. Firstly, the image of point light source is projected above the annular plane using inner focus collimator. And the image point is driven by precision rotary table to draw a circle. The circle plane is the reference. The point light source is imaging on the CCD. Then the distance between annular plane and reference plane is measured. Next, the testing data is analyzed by means of Fourier harmonic analysis method. The influence of constant item and the first item is removed. Then the flatness of the annular plane can be calculated by the data processing. The basic principle of the testing method is analyzed. An annular workpiece with the out-diameter of 5 m and the inner-diameter of 4.4 m and the height of 0.5 m is tested with this method. The flatness is 0.285 mm, and the repeatability is 0.009 3 mm. Finally, the measurement uncertainty of this method is analyzed, and the composed standard uncertainty is 0.007 4 mm.