光电技术应用
光電技術應用
광전기술응용
ELECTRO-OPTIC WARFARE & RADAR PASSIVE COUNTERMEASURES
2015年
4期
8-10,38
,共4页
激光技术%激光加工%硅材料%热效应%温度场分布
激光技術%激光加工%硅材料%熱效應%溫度場分佈
격광기술%격광가공%규재료%열효응%온도장분포
laser technology%laser cutting%silicon material%heat effect%temperature field distribution
激光加工硅材料过程中产生的热效应现象对产品良率有不良影响。为了降低热效应现象的影响,对激光辐照硅材料表面时硅材料的温度升高与分布情况进行了研究。使用光纤连续激光器作为光源辐照硅材料表面,记录了硅材料在不同激光功率密度和照射时间情况下的温度升高与分布情况,得到了实验数据。并根据实验条件和参数进行了仿真建模和模拟计算,得到了激光辐照下硅材料温度分布模型,该模型仿真数据与实验结果基本吻合,可通过修改该模型参数进行激光加工进行模拟实验,为激光加工时的参数选择提供了实验依据。
激光加工硅材料過程中產生的熱效應現象對產品良率有不良影響。為瞭降低熱效應現象的影響,對激光輻照硅材料錶麵時硅材料的溫度升高與分佈情況進行瞭研究。使用光纖連續激光器作為光源輻照硅材料錶麵,記錄瞭硅材料在不同激光功率密度和照射時間情況下的溫度升高與分佈情況,得到瞭實驗數據。併根據實驗條件和參數進行瞭倣真建模和模擬計算,得到瞭激光輻照下硅材料溫度分佈模型,該模型倣真數據與實驗結果基本吻閤,可通過脩改該模型參數進行激光加工進行模擬實驗,為激光加工時的參數選擇提供瞭實驗依據。
격광가공규재료과정중산생적열효응현상대산품량솔유불량영향。위료강저열효응현상적영향,대격광복조규재료표면시규재료적온도승고여분포정황진행료연구。사용광섬련속격광기작위광원복조규재료표면,기록료규재료재불동격광공솔밀도화조사시간정황하적온도승고여분포정황,득도료실험수거。병근거실험조건화삼수진행료방진건모화모의계산,득도료격광복조하규재료온도분포모형,해모형방진수거여실험결과기본문합,가통과수개해모형삼수진행격광가공진행모의실험,위격광가공시적삼수선택제공료실험의거。
The temperature rising and distribution of silicon material irradiated by laser are researched for re?ducing the influence of heat effect. A fiber continuous laser is used as a light power to irradiate silicon material sur?face to record the temperature rising and distribution of silicon material under different laser power density and irra?diation time. And experimental data is obtained. According to experimental conditions and parameters, simulation and calculation are performed to get the temperature distribution model of silicon material under laser irradiation. The simulation data of the model accords with the experimental results. Laser cutting simulation experiment can be performed through correcting the parameters of the model, which provides experimental reference for parameter choosing during laser cutting.