CAJ | 학술논문

基于多物理场动态耦合分析方法建立了考虑微流体压膜阻尼效应的静电激励微板机电耦合系统动力学模型，采用KBM法对微板多物理场耦合动力学响应问题进行了求解。通过静电激励微板动力学实验，采集到了简谐激励下系统响应共振频率、波形图及幅值谱图，图像显示出微板机电耦合系统具有明显的非线性动力学特征。与实验结果对比表明：这种基于多物理场动态耦合分析方法所求得的动力学响应解具有足够的精度。该方法有助于研究静电激励微板的动力学特性并可应用于M EM S动力学设计。
기우다물리장동태우합분석방법건립료고필미류체압막조니효응적정전격려미판궤전우합계통동역학모형，채용KBM법대미판다물리장우합동역학향응문제진행료구해。통과정전격려미판동역학실험，채집도료간해격려하계통향응공진빈솔、파형도급폭치보도，도상현시출미판궤전우합계통구유명현적비선성동역학특정。여실험결과대비표명：저충기우다물리장동태우합분석방법소구득적동역학향응해구유족구적정도。해방법유조우연구정전격려미판적동역학특성병가응용우M EM S동역학설계。
The dynamic model of electro statically actuated micro‐plate considering squeeze film damping effect of micro fluid is built according to dynamic analysis method of multi‐physics coupled .Using KBM method ,the dynamic response about multi‐physics coupled micro‐plate is solved .The resonance frequency ,waveforms and amplitude spectrum actuated by harmonic volt‐age are received by means of dynamics experiment .The results show that the micro‐plate electromechanical coupled system has obvious nonlinear characteristics .Comparing with experimental results ,it shows that the obtained solutions based on the multi‐physics coupled method have sufficient accuracy .This study may be helpful to studying dynamic characteristics of electro statically actuated micro‐plate ,and being used to application of dynamic design in MEMS .