CAJ | 학술논문

基于透明电介质的烧蚀率计算模型，建立了飞秒激光烧蚀石英玻璃的微槽截面形状仿真模型，并通过烧蚀实验验证了模型的可靠性。利用所建模型分析了光斑半径、脉冲能量和扫描速度等参数对微槽截面形状的影响规律。研究表明，减小光斑半径、提高脉冲能量或降低扫描速度均可以提高微槽的槽深和侧壁角；微槽的槽宽随脉冲能量的提高或扫描速度的降低而增大，但随光斑半径的增大，其呈现先增大后减小的规律，在脉冲能量为4μJ、扫描速度为0.2 mm/s的条件下，槽宽在光斑半径为13μm时达到最大值8.13μm。
기우투명전개질적소식솔계산모형，건립료비초격광소식석영파리적미조절면형상방진모형，병통과소식실험험증료모형적가고성。이용소건모형분석료광반반경、맥충능량화소묘속도등삼수대미조절면형상적영향규률。연구표명，감소광반반경、제고맥충능량혹강저소묘속도균가이제고미조적조심화측벽각；미조적조관수맥충능량적제고혹소묘속도적강저이증대，단수광반반경적증대，기정현선증대후감소적규률，재맥충능량위4μJ、소묘속도위0.2 mm/s적조건하，조관재광반반경위13μm시체도최대치8.13μm。
The cross-section shape simulation model of micro-groove in femtosecond laser ablation of quartz glass was built based on the ablation rate model of transparent dielectric. Besides, the model was verified by ablation experiment. The effect of pulse energy and scan speed on the cross-section shape of micro-groove was analyzed to achieve the adjustment method of micro-groove shape. The analysis of simulation results shows that the depth and sidewall angle of micro-groove can be improved by decreasing the spot radius, increasing the pulse energy or slowing the scan speed. The width of micro-groove be improved by increasing the pulse energy or slowing the scan speed, but with the increasing of spot radius, it first increases and then decreases. The width of micro-groove reaches a maximum of 8.13 μm at the spot radius of 13 μm with the pulse of 4 μJ and the scan speed of 0.2 mm/s.