大学物理实验
大學物理實驗
대학물리실험
PHYSICAL EXPERIMENT OF COLLEGE
2015年
4期
10-12
,共3页
杨雨灵%王栋%刘建鹏%张森%兰勇%戴穗安%李修建
楊雨靈%王棟%劉建鵬%張森%蘭勇%戴穗安%李脩建
양우령%왕동%류건붕%장삼%란용%대수안%리수건
硅单晶碎屑%XRD%SEM
硅單晶碎屑%XRD%SEM
규단정쇄설%XRD%SEM
silicon single crystal debris%XRD%SEM
对研磨不充分的硅单晶碎屑进行θ单动XRD实验，得到无规的衍射图像。根据碎屑的SEM扫描图像和进一步模型分析，给实验结果定性解释：碎屑颗粒较大且大小不均匀导致的微取向不均匀，使得衍射强度随θ角度变化剧烈。
對研磨不充分的硅單晶碎屑進行θ單動XRD實驗，得到無規的衍射圖像。根據碎屑的SEM掃描圖像和進一步模型分析，給實驗結果定性解釋：碎屑顆粒較大且大小不均勻導緻的微取嚮不均勻，使得衍射彊度隨θ角度變化劇烈。
대연마불충분적규단정쇄설진행θ단동XRD실험，득도무규적연사도상。근거쇄설적SEM소묘도상화진일보모형분석，급실험결과정성해석：쇄설과립교대차대소불균균도치적미취향불균균，사득연사강도수θ각도변화극렬。
This article is about the θ scan XRD experiment of not-sufficient grinded silicon crystal debris, which exhibits a irregular diffraction image. According to the SEM scan images and theoretical analysis, we draw a qualitative explanation as following. The scale of debris is larger than normal crystal powder and the non-uniform micro-orientation makes the dramatic change of diffraction intensity in different θ angle.
