CAJ | 학술논문

研究并建立了多脉冲激光辐照Al2O3增透薄膜及K9玻璃基底的物理模型，采用有限元算法求解相应的热传导方程和热应力方程，得到了材料内部热应力场分布。数值模拟结果表明，材料内部环向力起主导作用，且温度冷却时，残余环向热应力沿径向移动，在低频情况下，先发生热应力损伤的是基底，后发生热应力损伤的是薄膜。研究成果可为激光与薄膜相互作用机理以及薄膜的抗激光损伤提供一定的理论依据和指导。
연구병건립료다맥충격광복조Al2O3증투박막급K9파리기저적물리모형，채용유한원산법구해상응적열전도방정화열응력방정，득도료재료내부열응력장분포。수치모의결과표명，재료내부배향력기주도작용，차온도냉각시，잔여배향열응력연경향이동，재저빈정황하，선발생열응력손상적시기저，후발생열응력손상적시박막。연구성과가위격광여박막상호작용궤리이급박막적항격광손상제공일정적이론의거화지도。
In this paper,we study and establish the physical model of the multiple pulse laser irradiation Al2O3 anti-re-flection thin film and K9 glass substrate, using the finite element algorithm to solve the corresponding equation of heat conduction and thermal stress, thus having the thermal stress field distribution inside the material. Numerical simulation results show that the ring stress internal material is playing a leading role, and when the temperature cool down, the residual ring thermal stress move along the radial, under the condition of low frequency, the thermal stress damage is the basement first, after then is the thin film. This article research results can provide necessary theory and guidance for laser interaction with film and film anti-laser damage.