CAJ | 학술논문

为改善304不锈钢的性能,扩展其应用范围,采用磁控溅射技术在不同溅射靶功率下激发高纯石墨靶在 p(100)单晶硅和304不锈钢表面沉积类金刚石碳薄膜。文章对所制备的系列类金刚石碳薄膜作了 Raman 光谱、X 射线衍射(XRD)、原子力显微镜(AFM)、断口形貌的场发射电镜(FESEM)表征,并评价了其纳米硬度与摩擦磨损行为。结果表明：所制备的类金刚石碳薄膜为典型的非晶态微结构；随着靶功率的增大,类金刚石碳薄膜的 sp3键含量先增多后减少,表面粗糙度先降低后升高,硬度与弹性模量先升高后降低；靶功率200 W 时类金刚石碳薄膜取得最优性能,纳米硬度为11.4 GPa,弹性模量为129.3 GPa,摩擦系数为0.17,磨损率为5.2×10-7 mm3(N·m)-1。
위개선304불수강적성능,확전기응용범위,채용자공천사기술재불동천사파공솔하격발고순석묵파재 p(100)단정규화304불수강표면침적류금강석탄박막。문장대소제비적계렬류금강석탄박막작료 Raman 광보、X 사선연사(XRD)、원자력현미경(AFM)、단구형모적장발사전경(FESEM)표정,병평개료기납미경도여마찰마손행위。결과표명：소제비적류금강석탄박막위전형적비정태미결구；수착파공솔적증대,류금강석탄박막적 sp3건함량선증다후감소,표면조조도선강저후승고,경도여탄성모량선승고후강저；파공솔200 W 시류금강석탄박막취득최우성능,납미경도위11.4 GPa,탄성모량위129.3 GPa,마찰계수위0.17,마손솔위5.2×10-7 mm3(N·m)-1。
In order to improve the performance of 304 stainless steel and to extend its appli-cation field,high purity graphite target is to be stimulated to deposite diamond-like car-bon film on the surface of p(100)monocrystalline silicon and 304 stainless steel through magnetron sputtering technique under different sputtering powers.In this article,the se-ries of diamond-like carbon films have been analyzed and studied through Raman spectros-copy,XRD,AFM and FESEM and their nano-hardness and friction and wear behavior have been evaluated.Result shows that the diamond-like carbon films developed have a typical amorphous microstructure.As the target power increases,the content of sp3 bond first increases and then decreases;the surface roughness first decreases and then increa-ses;the hardness and elasticity modulus first increases and then decreases.The diamond-like carbon film presents the best performance when the target power is at 200W with a nano hardness of 1 1.4 GPa,elasticity modulus of 129.3 GPa,friction coefficient of 0.17 and wear rate of 5.2×10 -7 mm3 (N·m)-1 .