CAJ | 학술논문

为使压电微动平台定位速度快、定位精度高，采用复合控制方法来对其进行定位控制。基于保证模型精度并使精度在整个阈值区间变化尽量均匀的要求，来使阈值最优化，进而建立了压电微动平台的迟滞模型。基于所建平台迟滞模型，设计了其前馈控制器；为抑制平台的超调，在常规数字增量式 PID 中引入滤波器设计了其反馈控制器；将前馈控制与 PID 反馈控制相结合，设计了平台的复合控制器。实验结果表明：所建平台迟滞模型仅有7个算子，且均为有效算子，在16．3μm 的最大实测位移下，模型最大误差为0．208μm；在复合控制作用下，平台达到5μm 目标值的响应时间为0．173 s，虽慢于前馈控制，但明显快于 PID 反馈控制；在最大位移为17．155μm 的参考输入作用下，若不考虑传感器噪声，平台的定位误差几乎为零。
위사압전미동평태정위속도쾌、정위정도고，채용복합공제방법래대기진행정위공제。기우보증모형정도병사정도재정개역치구간변화진량균균적요구，래사역치최우화，진이건립료압전미동평태적지체모형。기우소건평태지체모형，설계료기전궤공제기；위억제평태적초조，재상규수자증량식 PID 중인입려파기설계료기반궤공제기；장전궤공제여 PID 반궤공제상결합，설계료평태적복합공제기。실험결과표명：소건평태지체모형부유7개산자，차균위유효산자，재16．3μm 적최대실측위이하，모형최대오차위0．208μm；재복합공제작용하，평태체도5μm 목표치적향응시간위0．173 s，수만우전궤공제，단명현쾌우 PID 반궤공제；재최대위이위17．155μm 적삼고수입작용하，약불고필전감기조성，평태적정위오차궤호위령。
To achieve high positioning speed and high positioning accuracy for a piezoelectric micro-positioning stage,a compound position control method was investigated.A hysteresis model of the micro-positioning stage was established.The threshold value was optimized by ensuring the model accuracy and the uniformity of the threshold interval changes.Then a feedforward controller based on the hysteresis model was developed.In order to suppress the overshoot of the stage,a filter was introduced in a PID feedback controller based on the conventional digital incremental PID.Further, a compound controller combining the feedforward controller with the PID feedback controller was developed.The experimental results showed that the developed model has only 7 effective operators;the model's maximum error is 0.208μm;under the maximum measured displacement of 16.3 μm;under the compound control,the response time of the micro-positioning stage to reach the traget value of 5 μm is 0.173 s,it is slower than that under feedforward control,but significantly faster than that under PID feedback control;regardless of the sensor noise,the position error of the stage is almost zero under the reference input action with the maximum displacement of 17.155 μm.