发光学报
髮光學報
발광학보
CHINESE JOURNAL OF LUMINESCENCE
2015年
9期
1094-1099
,共6页
李文昊%姜岩秀%吴娜%张桐%王鹍
李文昊%薑巖秀%吳娜%張桐%王鹍
리문호%강암수%오나%장동%왕곤
变栅距光栅%球面波%刻槽密度%光谱分辨能力
變柵距光柵%毬麵波%刻槽密度%光譜分辨能力
변책거광책%구면파%각조밀도%광보분변능력
varied-line-space grating%spherical wavefront%groove density%spectral resolution
针对应用于50~150 nm波段的变栅距光栅,采用球面波曝光系统进行优化设计,分析了不同宽度光栅的刻槽密度变化和光谱分辨能力。理论分析结果表明,光栅宽度为4 mm时,理论分辨能力高于14000;光栅宽度为10 mm时,理论分辨能力约为9000;光栅宽度为30 mm时,理论分辨能力急剧下降,约为3000。光栅的宽度越大,其刻槽弯曲程度就越大,光栅的光谱分辨能力就越低,因此球面波曝光系统只适合制作宽度较小的变栅距光栅。
針對應用于50~150 nm波段的變柵距光柵,採用毬麵波曝光繫統進行優化設計,分析瞭不同寬度光柵的刻槽密度變化和光譜分辨能力。理論分析結果錶明,光柵寬度為4 mm時,理論分辨能力高于14000;光柵寬度為10 mm時,理論分辨能力約為9000;光柵寬度為30 mm時,理論分辨能力急劇下降,約為3000。光柵的寬度越大,其刻槽彎麯程度就越大,光柵的光譜分辨能力就越低,因此毬麵波曝光繫統隻適閤製作寬度較小的變柵距光柵。
침대응용우50~150 nm파단적변책거광책,채용구면파폭광계통진행우화설계,분석료불동관도광책적각조밀도변화화광보분변능력。이론분석결과표명,광책관도위4 mm시,이론분변능력고우14000;광책관도위10 mm시,이론분변능력약위9000;광책관도위30 mm시,이론분변능력급극하강,약위3000。광책적관도월대,기각조만곡정도취월대,광책적광보분변능력취월저,인차구면파폭광계통지괄합제작관도교소적변책거광책。
For the varied line-space ( VLS) grating used in the region of 50-150 nm, the spherical wave exposure system was used for the optimization design, and the groove density and spectra reso-lution of the different width grating were analyzed. The theory resolution ability is higher than 14 000 when the grating width is 4 mm in the use of wavelength range, about 9 000 when the grating width is 10 mm, and about 3 000 when the grating width is 30 mm, respectively. The bigger the grating width is, the bigger the bending degree of groove is, and the lower the spectral resolution ability is. Therefore, spherical wave exposure system is only suitable for making the VLS grating with smaller width.