华东理工大学学报：社会科学版
華東理工大學學報：社會科學版
화동리공대학학보：사회과학판
SOCIAL SCIENCES JOURNAL OF ECUST
2004年
5期
~
,共null页
陆慧 陆元成 张波 张月兰 潘孝仁
陸慧 陸元成 張波 張月蘭 潘孝仁
륙혜 륙원성 장파 장월란 반효인
纳米ZnO薄膜 沉积 表面形貌 晶体结构 应力
納米ZnO薄膜 沉積 錶麵形貌 晶體結構 應力
납미ZnO박막 침적 표면형모 정체결구 응력
nanometer ZnO films; deposited; surface morphology; crystal structure; stress;
采用气体放电活化反应蒸发技术(GDARE),以玻璃为衬底,在较低的温度下沉积纳米ZnO薄膜,用二次蒸镀法克服薄膜生长饱和问题、有效增加膜厚及改善薄膜质量。讨论了GDARE法低温下沉积纳米ZnO薄膜的生长过程及成膜机理。由原子力显微镜(AFM)和X-射线衍射谱(XRD)分析薄膜表面形貌和晶体结构,研究结果表明,二次蒸镀法沉积的双层纳米ZnO薄膜具有更好的结晶质量及长期稳定性,薄膜沿c轴高度取向生长,内应力较小,晶粒尺寸均匀,平均粒径约35nm,表面粗糙度降低。
採用氣體放電活化反應蒸髮技術(GDARE),以玻璃為襯底,在較低的溫度下沉積納米ZnO薄膜,用二次蒸鍍法剋服薄膜生長飽和問題、有效增加膜厚及改善薄膜質量。討論瞭GDARE法低溫下沉積納米ZnO薄膜的生長過程及成膜機理。由原子力顯微鏡(AFM)和X-射線衍射譜(XRD)分析薄膜錶麵形貌和晶體結構,研究結果錶明,二次蒸鍍法沉積的雙層納米ZnO薄膜具有更好的結晶質量及長期穩定性,薄膜沿c軸高度取嚮生長,內應力較小,晶粒呎吋均勻,平均粒徑約35nm,錶麵粗糙度降低。
채용기체방전활화반응증발기술(GDARE),이파리위츤저,재교저적온도하침적납미ZnO박막,용이차증도법극복박막생장포화문제、유효증가막후급개선박막질량。토론료GDARE법저온하침적납미ZnO박막적생장과정급성막궤리。유원자력현미경(AFM)화X-사선연사보(XRD)분석박막표면형모화정체결구,연구결과표명,이차증도법침적적쌍층납미ZnO박막구유경호적결정질량급장기은정성,박막연c축고도취향생장,내응력교소,정립척촌균균,평균립경약35nm,표면조조도강저。
Nanometer ZnO films grown at low temperature were deposited on glass substrates by gas discharge reaction evaporation.By twice deposited the problem of film growing saturation could be solved, the film thickness effectively increased and film quality be improved. The grown mechanism of ZnO films was discussed. Their surface morphology and crystal structure was studied by atomic force microscopy (AFM) and X-ray diffraction (XRD). The results show that double layer nanometer ZnO films have better crystallin...
