CAJ | 학술논문

针对光刻设备组的生产特点，基于最小化加工时间对其调度问题建立了整数规划数学模型，并提出了一种启发式调度策略。运用Extend仿真软件对传统的FCFS和启发式调度策略分别进行仿真，结果表明，启发式调度策略在减少加工时间和提高设备利用率上皆优于FCFS。
침대광각설비조적생산특점，기우최소화가공시간대기조도문제건립료정수규화수학모형，병제출료일충계발식조도책략。운용Extend방진연건대전통적FCFS화계발식조도책략분별진행방진，결과표명，계발식조도책략재감소가공시간화제고설비이용솔상개우우FCFS。
Photolithography area dispatching is a kind of parallel machines＇ dispatching problems with process constraints. Photolithography is always considered the bottleneck of the wafer fabrication in semiconductor manufacturing. Based on an integer programming model to minimize the total processing time, a heuristics dispatching rule was proposed. Both the FCFS and the heuristics dispatching rule were simulated by Extend software. The result shows that the heuristics dispatching rule is much better than FCFS in processing time reduction and equipment utility improvement.