CAJ | 학술논문

作为半导体制造中单晶圆加工技术的可重构集成设备,组合设备在半导体产业得到越来越广泛的应用。使用组合设备使得半导体制造产出更高、生产周期更短、空间利用率更高以及生产成本更低。由于组合设备的运行受限于诸多约束条件,有效运行一台组合设备相当困难。目前已有大量的有关组合设备建模、性能分析及调度等相关研究工作。本文回顾了这些研究工作的进展及其使用的研究方法,探讨了现有的方法的优缺点。基于这些分析,指出了进一步的研究方向。
작위반도체제조중단정원가공기술적가중구집성설비,조합설비재반도체산업득도월래월엄범적응용。사용조합설비사득반도체제조산출경고、생산주기경단、공간이용솔경고이급생산성본경저。유우조합설비적운행수한우제다약속조건,유효운행일태조합설비상당곤난。목전이유대량적유관조합설비건모、성능분석급조도등상관연구공작。본문회고료저사연구공작적진전급기사용적연구방법,탐토료현유적방법적우결점。기우저사분석,지출료진일보적연구방향。
As integrated and configurable equipment with single wafer processing, cluster tools are increasingly adopted by semiconductor manufacturers. It results in higher yield, shorter cycle time, better utiliza- tion of space, and lower fabrication cost. However, with various constraints, it is difficult to effectively op- erate a cluster tool. Thus, great research attention has been paid for modeling, analyzing, and scheduling of cluster tools. In this paper, research advancement and techniques in modeling, analyzing, and schedu- ling of cluster tools are reviewed. It analyzes the advantages and disadvantages of the existing techniques. Based on the analysis, future research directions are given.