CAJ | 학술논문

由于大直径晶圆的加工具有严格的逗留时间约束和时间波动，使得组合设备的调度及其可行性的验证存在很大的困难，而仿真是一个有效的方法．如果组合设备的调度存在可行性，那么，通过仿真能够找到系统的可行调度．利用eM—Plant建立了虚拟的单臂组合设备，该系统是可重配置的．不同类型的晶圆加工具有不同的晶圆流模式和加工时间，该虚拟组合设备能够模拟不同的晶圆加工，而参数化的虚拟组合设备实现了可重用性．为了实现可视化，建立了三维模型的虚拟组合设备．对于操作组合设备的工程人员来说，该系统是直观和有效的．最后，通过例子验证了虚拟组合设备是可行的．
유우대직경정원적가공구유엄격적두류시간약속화시간파동，사득조합설비적조도급기가행성적험증존재흔대적곤난，이방진시일개유효적방법．여과조합설비적조도존재가행성，나요，통과방진능구조도계통적가행조도．이용eM—Plant건립료허의적단비조합설비，해계통시가중배치적．불동류형적정원가공구유불동적정원류모식화가공시간，해허의조합설비능구모의불동적정원가공，이삼수화적허의조합설비실현료가중용성．위료실현가시화，건립료삼유모형적허의조합설비．대우조작조합설비적공정인원래설，해계통시직관화유효적．최후，통과례자험증료허의조합설비시가행적．
With wafer residency time constraint and activity time variation, it is very difficult to schedule a cluster tool and to check if a given schedule is feasible. To solve this problem, simulation can be used to determine if a given schedule is feasible and help to obtain a feasible schedule. For this purpose, in this paper a virtual single-arm cluster tool is developed by using eM-Plant simulation system. A cluster tool is reconfigurable and can be used to process different types of wafers. Different type of wafers has different flow pattern and different processing times. Thus, the virtual cluster tool should be reusable. With parameterization, the system is made to be reusable. It is a 3-dimention model so that it is visualized. Thus, it is useful for practitioners to operate a duster tool. Examples are presented to demonstrate the applications of the system.