泉州师范学院学报
泉州師範學院學報
천주사범학원학보
Journal of Quanzhou Normal College
2015年
2期
84~88
,共null页
高低结 真空制备 霍尔效应 快速测量
高低結 真空製備 霍爾效應 快速測量
고저결 진공제비 곽이효응 쾌속측량
high-low junction; vacuum preparation; Hall effect; rapid measurement
针对MD-450C型的真空镀膜机不能完成浅PN结的后期工艺处理问题,文章介绍了真空镀膜机的改造以及利用改造后的设备进行高低结的真空制备.通过对四电极霍尔效应样品的桥式等效电路的讨论,得出了浅PN结两侧导电类型同时测量的快速方法.
針對MD-450C型的真空鍍膜機不能完成淺PN結的後期工藝處理問題,文章介紹瞭真空鍍膜機的改造以及利用改造後的設備進行高低結的真空製備.通過對四電極霍爾效應樣品的橋式等效電路的討論,得齣瞭淺PN結兩側導電類型同時測量的快速方法.
침대MD-450C형적진공도막궤불능완성천PN결적후기공예처리문제,문장개소료진공도막궤적개조이급이용개조후적설비진행고저결적진공제비.통과대사전겁곽이효응양품적교식등효전로적토론,득출료천PN결량측도전류형동시측량적쾌속방법.
Since MD-450C type vacuum coating machine can not complete post-treatment process issues of shallow PN junction, the study described the transformation of vacuum coating machine and used it for the preparation of high-low junction in a vacuum system.Through the discussion of four- electrode bridge equivalent circuit of Hall effect samples, a rapid method was obtained for simultaneously measuring conductivity type on both sides in a shallow PN junction.
