CAJ | 학술논문

为控制微通道内微流体流向，提出了一种声表面波关闭微通道方法。在128°旋转Y切割X传播方向的LiNbO3压电基片上制作中心频率为27.5 MHz的叉指换能器，其激发的声表面波熔融聚二甲基硅氧烷微槽内固体石蜡，熔融后的石蜡由于毛细作用力沿微通道输运。当移去激发声表面波的电信号后，熔融石蜡固化并阻塞微通道，实现微通道关闭。以红色染料溶液为实验对象，对微通道进行关闭操作。结果表明，声表面波可以成功地实现微通道关闭操作，当电信号功率为31.7 dBm时，微通道关断时间约为5 min。本文工作对声表面波为驱动源的微阀研究具有一定的借鉴意义。
위공제미통도내미류체류향，제출료일충성표면파관폐미통도방법。재128°선전Y절할X전파방향적LiNbO3압전기편상제작중심빈솔위27.5 MHz적차지환능기，기격발적성표면파용융취이갑기규양완미조내고체석사，용융후적석사유우모세작용력연미통도수운。당이거격발성표면파적전신호후，용융석사고화병조새미통도，실현미통도관폐。이홍색염료용액위실험대상，대미통도진행관폐조작。결과표명，성표면파가이성공지실현미통도관폐조작，당전신호공솔위31.7 dBm시，미통도관단시간약위5 min。본문공작대성표면파위구동원적미벌연구구유일정적차감의의。
For controlling the flow direction of microfluid in microchannels,a new method for switching off micro?channels by surface acoustic wave is presented. An interdigital transducer with 27.5 MHz center frequency is fabri?cated on a 128° yx-LiNbO3 piezoelectric substrate for exciting surface acoustic wave. Solid paraffin in poly(dimeth?ylsiloxane)groove is melted by surface acoustic wave and transported along a microchannel due to capillary force. As soon as the electric signal for exciting surface acoustic wave is moved off,the paraffin is solidified and blocked the microchannel. The microchannel is then switched off. Red dye solution is used to demonstrate the operation of switching off the microchannel. Results show that the microchannel can successfully be switched off by surface acoustic wave. Near five minutes switching time is obtained when the electric signal power is 31.7 dBm. The work is help for researchers to study on microvalves controlled by surface acoustic wave.