CAJ | 학술논문

以硫化镉（CdS ）为主要原料，氯化镉（C dC l2）为助熔剂，采用干压成型、真空烧结的方式制备CdS陶瓷靶材。探讨了原料性质、烧结温度、CdCl2添加量对靶材相对密度、烧结线收缩率、显气孔率及表面电阻率的影响。用阿基米德法测定靶材密度、用四探针测试仪测试靶材表面电阻率、用X RD测试靶材晶相结构、用SEM 观察靶材微观形貌。实验结果表明，靶材试样的晶相主要为六方相CdS ，晶粒均匀（晶粒大小在3～8μm之间），密度达到45．5 g／cm3，显气孔率45．9％，表面电阻率892．Ω?cm ，能满足磁控溅射镀膜工艺对靶材的指标要求。
이류화력（CdS ）위주요원료，록화력（C dC l2）위조용제，채용간압성형、진공소결적방식제비CdS도자파재。탐토료원료성질、소결온도、CdCl2첨가량대파재상대밀도、소결선수축솔、현기공솔급표면전조솔적영향。용아기미덕법측정파재밀도、용사탐침측시의측시파재표면전조솔、용X RD측시파재정상결구、용SEM 관찰파재미관형모。실험결과표명，파재시양적정상주요위륙방상CdS ，정립균균（정립대소재3～8μm지간），밀도체도45．5 g／cm3，현기공솔45．9％，표면전조솔892．Ω?cm ，능만족자공천사도막공예대파재적지표요구。
Cadmium sulfide (CdS) target was developed by dry‐pressing molding and vacuum sintering with CdS raw material and CdCl2 as fusion .Raw material property and the influence of sintering temperature and CdCl2 content on relative density ,linear shrinking ,apparent porosity and resistivity of CdS target were studied in this paper .The density of target was measured using Archimedes method ,the resistivity was measured by SX1934 four probe instruments ,the phase structure of target was analyzed by X‐ray diffractometer with a monochroma‐ted Cu KαX‐ray source ,and the fracture morphology was observed by SEM photograph .Specifications were as following :the phase structure was hexagonal Wurtzite ,the density was 4 5.5 g/cm3 ,the pore ratio was 4 5.9% , the resistivity was 89 2. Ω?cm ,the crystal size was homogeneous (3‐8 μm) ,these properties can meet sputter coating requirements .