电子科学技术
電子科學技術
전자과학기술
Electronic Science & Technology
2015年
5期
525-531
,共7页
寇玉娟%戴思%岳晴瑞%王丽莎%吴垠昊
寇玉娟%戴思%嶽晴瑞%王麗莎%吳垠昊
구옥연%대사%악청서%왕려사%오은호
激光调阻%激光脉冲%激光切刻%切槽缺陷%调阻精度
激光調阻%激光脈遲%激光切刻%切槽缺陷%調阻精度
격광조조%격광맥충%격광절각%절조결함%조조정도
Laser Trimming Resistance%Laser Pulse%Laser Etching%Etching Notch Defect%Trimming Resistance Precision
本文介绍了激光调阻的基本原理和激光调阻系统,激光调阻工艺流程及工艺参数,调阻程序,切刻类型,分析了切槽缺陷和影响激光调阻精度的若干因素.
本文介紹瞭激光調阻的基本原理和激光調阻繫統,激光調阻工藝流程及工藝參數,調阻程序,切刻類型,分析瞭切槽缺陷和影響激光調阻精度的若榦因素.
본문개소료격광조조적기본원리화격광조조계통,격광조조공예류정급공예삼수,조조정서,절각류형,분석료절조결함화영향격광조조정도적약간인소.
Laser trimming resistance mechanism and trimming system of thick film hybrid integration circuit were introduced in this paper. Laser trimming resistance technological process, technological parameters, trimming resistance program, etching types and etching notch defect were also discussed. The influence of laser trimming resistance technological parameters on the trimming resistance value precision were analysed in detail.
