红外技术
紅外技術
홍외기술
Infrared Technology
2015年
8期
672-675
,共4页
微测辐射热计%等效折射率%吸收率%热响应时间
微測輻射熱計%等效摺射率%吸收率%熱響應時間
미측복사열계%등효절사솔%흡수솔%열향응시간
micro-bolometer%equivalent refractive index%absorptivity%thermal response time
介绍了一种计算多层结构微测辐射热计探测单元的红外吸收模型，并计算了所设计25?m微测辐射热计探测单元的红外吸收。当探测单元表面金属吸收层的方阻从2～600?/变化时，单元的吸收功率先逐渐增大，之后缓慢下降。对于300 K黑体辐射，当探测单元的吸收层方阻达到332?/时，吸收率达到最大。此时在8～14?m波段单元的红外吸收率平均值为72%，吸收功率为16 nW。在此基础上对探测单元结构的悬空高度进行优化，得到最优的两层悬空间隙高度均为0.8?m，最优吸收率为82%。
介紹瞭一種計算多層結構微測輻射熱計探測單元的紅外吸收模型，併計算瞭所設計25?m微測輻射熱計探測單元的紅外吸收。噹探測單元錶麵金屬吸收層的方阻從2～600?/變化時，單元的吸收功率先逐漸增大，之後緩慢下降。對于300 K黑體輻射，噹探測單元的吸收層方阻達到332?/時，吸收率達到最大。此時在8～14?m波段單元的紅外吸收率平均值為72%，吸收功率為16 nW。在此基礎上對探測單元結構的懸空高度進行優化，得到最優的兩層懸空間隙高度均為0.8?m，最優吸收率為82%。
개소료일충계산다층결구미측복사열계탐측단원적홍외흡수모형，병계산료소설계25?m미측복사열계탐측단원적홍외흡수。당탐측단원표면금속흡수층적방조종2～600?/변화시，단원적흡수공솔선축점증대，지후완만하강。대우300 K흑체복사，당탐측단원적흡수층방조체도332?/시，흡수솔체도최대。차시재8～14?m파단단원적홍외흡수솔평균치위72%，흡수공솔위16 nW。재차기출상대탐측단원결구적현공고도진행우화，득도최우적량층현공간극고도균위0.8?m，최우흡수솔위82%。
An infrared absorption model was described, which had been used for infrared absorption analysis for a 25?m two-level micro-bolometer pixel design. If the square resistance of surface metal film was changing from 2? to 600?, the absorption power of the pixel was enhanced at first, then it was reduced gradually. In the radiation of 300 Kelvin black body, the best absorption happened when the square resistance of absorption layer increased to 332?/. The highest absorptivity is 72%, corresponding absorption power is 16nW. According to the highest absorptivity of the described 25?m pixel, the vacuum gaps of the two-level pixel structure both had been optimized to 0.8?m for further enhancing absorption.
