CAJ | 학술논문

三甲基镓是应用金属有机化学气相沉积工艺生产光电材料的关键原料。目前，我国仍需从国外大量进口三甲基镓产品，因此有必要分析三甲基镓的合成制备及分离提纯技术的研发现状，从而进一步促进相关技术的研发进程。总结了三甲基镓的合成制备技术和分离提纯技术的研究现状，分析了各种技术的优缺点，并提出针对三甲基镓的制备提纯技术的工程放大研究是各种实验室新技术实现工业化生产应用的关键。
삼갑기가시응용금속유궤화학기상침적공예생산광전재료적관건원료。목전，아국잉수종국외대량진구삼갑기가산품，인차유필요분석삼갑기가적합성제비급분리제순기술적연발현상，종이진일보촉진상관기술적연발진정。총결료삼갑기가적합성제비기술화분리제순기술적연구현상，분석료각충기술적우결점，병제출침대삼갑기가적제비제순기술적공정방대연구시각충실험실신기술실현공업화생산응용적관건。
Trimethyl gallium (TMG) is the key raw material to produce optoelectronic materials by metal organic chemical vapor deposition (MOCVD) technology. At present, China still needs to import large quantities of TMG products. Therefore, it is necessary to analyze the R&D progress of TMG synthesis and purification technologies, so as to further promote the R&D process of the related technologies. In this paper, R&D status of TMG preparation and purification technologies was summarized, and advantages and disadvantages of various techniques were analyzed. It’s pointed out that the engineering study on the newly developed technology is the key point to realize its industrial application.