CAJ | 학술논문

介绍了一种双层SIW带通滤波器,两层之间采用交指结构实现谐振,输入输出采用共面波导形式.所设计的毫米波滤波器芯片尺寸仅有7 mm×3.5 mm×0.8 mm,使用三维高频电磁仿真软件对该结构进行仿真和优化,结果表明滤波性能符合设计要求:中心频率10.6 GHz、带宽2.5 GHz、带内插损2 dB.最后阐明了基于MEMS技术的该滤波器的工艺制作流程.
개소료일충쌍층SIW대통려파기,량층지간채용교지결구실현해진,수입수출채용공면파도형식.소설계적호미파려파기심편척촌부유7 mm×3.5 mm×0.8 mm,사용삼유고빈전자방진연건대해결구진행방진화우화,결과표명려파성능부합설계요구:중심빈솔10.6 GHz、대관2.5 GHz、대내삽손2 dB.최후천명료기우MEMS기술적해려파기적공예제작류정.
A double-layer SIW band-pass filter has been introduced,in which the interdigital strip-lines structure was utilized to achieve resonant and the CPW coplanar waveguide was used as the input and output lines. The chip size of the millimeter-wave filter designed is as small as 7 mm×3.5 mm×0.8 mm. Then the filter was simulated and optimized by using a 3D electro-magnetic field analysis software. The simulation results show that the central fre-quency,bandwidth,and insertion loss of the designed filter respectively are 10.6 GHz,2.5 GHz and 2 dB,which ful-ly meet the design aims. Finally,the fabrication process of the MEMS-based filter was presented.