CAJ | 학술논문

碳化硅切割刃料的圆形度对晶硅片线切割有着重要影响。对高压辊磨法制备碳化硅微粉过程中影响圆形度的因素进行理论分析和实验研究，分别研究了亚微粉(Φ≤2μm)含量、碳化硅纯度、1#分级机转速和磨辊磨损四个因素对圆形度的影响。探讨了降低微粉圆形度，并稳定圆形度指标的方法，能够获得具有较多棱角颗粒的低圆形度微粉，对提高碳化硅微粉的工业价值和经济价值，提高晶硅片切割效率，具有重要意义。
탄화규절할인료적원형도대정규편선절할유착중요영향。대고압곤마법제비탄화규미분과정중영향원형도적인소진행이론분석화실험연구，분별연구료아미분(Φ≤2μm)함량、탄화규순도、1#분급궤전속화마곤마손사개인소대원형도적영향。탐토료강저미분원형도，병은정원형도지표적방법，능구획득구유교다릉각과립적저원형도미분，대제고탄화규미분적공업개치화경제개치，제고정규편절할효솔，구유중요의의。
The SiC powder circularity has great influences on wire sawing of silicon ingot. The primary factors that influence SiC powder circularity prepared by the high pressure roller mill were made the theoretical analysis and experimental study. The effects of sub-power content (Φ≤2 μm) , purity of SiC, rotation speeds of 1 # classifier, and wear of roller on the circularity were studied, respectively. Studies were also made on the lowing circularity methods. The results showed that these methods permited to maintain consistency of circularity, and obtained low circularity SiC powder which had more rhombohedral particles. It was important to enhance the industrial and economic value and to improve the wire sawing efficiency.