传感器与微系统
傳感器與微繫統
전감기여미계통
Transducer and Microsystem Technologies
2015年
10期
76-78,82
,共4页
PT2262/2272%热电偶%无线测温%单片机%籽晶
PT2262/2272%熱電偶%無線測溫%單片機%籽晶
PT2262/2272%열전우%무선측온%단편궤%자정
PT2262/2272%thermocouple%wireless measuring temperature%MCU%seed crystal
为了测量晶体生长过程中旋转籽晶的结晶界面温度，针对旋转籽晶不便布线的问题，提出了用单片机和PT2262/2272无线发射/接收芯片与热电偶结合设计温度无线传感器的新方法。设计制作了一种无线温度传感器，经安装试用获得成功。较好地解决了旋转籽晶结晶界面温度检测问题。对晶体整个生长过程中结晶界面温度进行了实时检测、存储和记录。为分析晶体生长缺陷，进一步提高晶体生长质量提供了第一手资料。
為瞭測量晶體生長過程中鏇轉籽晶的結晶界麵溫度，針對鏇轉籽晶不便佈線的問題，提齣瞭用單片機和PT2262/2272無線髮射/接收芯片與熱電偶結閤設計溫度無線傳感器的新方法。設計製作瞭一種無線溫度傳感器，經安裝試用穫得成功。較好地解決瞭鏇轉籽晶結晶界麵溫度檢測問題。對晶體整箇生長過程中結晶界麵溫度進行瞭實時檢測、存儲和記錄。為分析晶體生長缺陷，進一步提高晶體生長質量提供瞭第一手資料。
위료측량정체생장과정중선전자정적결정계면온도，침대선전자정불편포선적문제，제출료용단편궤화PT2262/2272무선발사/접수심편여열전우결합설계온도무선전감기적신방법。설계제작료일충무선온도전감기，경안장시용획득성공。교호지해결료선전자정결정계면온도검측문제。대정체정개생장과정중결정계면온도진행료실시검측、존저화기록。위분석정체생장결함，진일보제고정체생장질량제공료제일수자료。
Because seed rod always rotates in process crystal growth,it is difficult to measure crystallize interface temperature in crystal growth process. Aiming at the problem of difficult wiring of rotating seed crystal,a new method is put forward to design a wireless sensor with micro controller unit( MCU)and PT2262/2272 wireless transmission/receiving chip and match up with thermocouple,realize wireless measurement of crystal growth temperature,and measurement result can be recorded and stored. It lays good foundation for analyzing crystal growth blemish and improving growth quality.
