CAJ | 학술논문

针对低压功率器件传统工艺流程进行创新和优化，以原有的6层掩膜板为基础，对掩膜板层数进行削减，用接触孔掩膜板完成原有的保护环掩膜板，工作区掩膜板及 N+区掩膜板的作用。器件的电性参数目标，通过设计具体工艺参数，并对其进行仿真，以验证工艺可行性。所用的参数与设计方案适用于所有低压功率器件生产制造。
침대저압공솔기건전통공예류정진행창신화우화，이원유적6층엄막판위기출，대엄막판층수진행삭감，용접촉공엄막판완성원유적보호배엄막판，공작구엄막판급 N+구엄막판적작용。기건적전성삼수목표，통과설계구체공예삼수，병대기진행방진，이험증공예가행성。소용적삼수여설계방안괄용우소유저압공솔기건생산제조。
The innovation and optimization for the traditional technology process of low?voltage power device were conduct?ed. Based on original six?layer mask,the mask layers were reduced. The functions of protecting ring mask,working area mask and N+ area mask are were replaced by the contact hole mask. The electrical parameters of the device were simulated by design?ing the specific technology technological parameters,the feasibility of the technology was verified. The proposed parameters and design scheme are suitable for production and manufacture of all low?voltage MOSFETs.