红外与激光工程
紅外與激光工程
홍외여격광공정
Infrared and Laser Engineering
2015年
10期
2987-2994
,共8页
方楚%郭劲%徐新行%王挺峰
方楚%郭勁%徐新行%王挺峰
방초%곽경%서신행%왕정봉
快速反射镜%四周式柔性支撑%支撑杆%支撑片%压电陶瓷
快速反射鏡%四週式柔性支撐%支撐桿%支撐片%壓電陶瓷
쾌속반사경%사주식유성지탱%지탱간%지탱편%압전도자
fast steering mirror%all-around flexure support%flexure staff%flexure ring%piezoelectric cercomics
为了有效吸收反射镜偏转造成驱动点的横向位置偏差,保护压电陶瓷驱动器,抑制反射镜在非工作方向上的自由度,提高系统谐振频率,设计了基于压电陶瓷驱动的快速反射镜三自由度柔性支撑.首先根据压电陶瓷驱动的快速反射镜对柔性支撑的设计要求确定了由支撑杆与支撑片组成的三自由度四周式柔性支撑方案,再利用压杆稳定性理论与变形能法对支撑杆与支撑片进行参数设计,最后利用workbench对设计结果进行分析.有限元分析结果表明,直径1 mm、长度8 mm的柔性支撑杆的应用可以使压电陶瓷的剪切位移减少86.7%,柔性支撑片的应用使反射镜一阶模态为轴向平移振动,谐振频率为360 Hz ,二三阶模态为反射镜两轴偏摆振动,谐振频率为420 Hz ,而高阶模态在1 000 Hz以上.三自由度柔性支撑可以有效防止压电陶瓷受到剪切破坏,提高快速反射镜结构谐振频率,有利于提高系统闭环带宽.
為瞭有效吸收反射鏡偏轉造成驅動點的橫嚮位置偏差,保護壓電陶瓷驅動器,抑製反射鏡在非工作方嚮上的自由度,提高繫統諧振頻率,設計瞭基于壓電陶瓷驅動的快速反射鏡三自由度柔性支撐.首先根據壓電陶瓷驅動的快速反射鏡對柔性支撐的設計要求確定瞭由支撐桿與支撐片組成的三自由度四週式柔性支撐方案,再利用壓桿穩定性理論與變形能法對支撐桿與支撐片進行參數設計,最後利用workbench對設計結果進行分析.有限元分析結果錶明,直徑1 mm、長度8 mm的柔性支撐桿的應用可以使壓電陶瓷的剪切位移減少86.7%,柔性支撐片的應用使反射鏡一階模態為軸嚮平移振動,諧振頻率為360 Hz ,二三階模態為反射鏡兩軸偏襬振動,諧振頻率為420 Hz ,而高階模態在1 000 Hz以上.三自由度柔性支撐可以有效防止壓電陶瓷受到剪切破壞,提高快速反射鏡結構諧振頻率,有利于提高繫統閉環帶寬.
위료유효흡수반사경편전조성구동점적횡향위치편차,보호압전도자구동기,억제반사경재비공작방향상적자유도,제고계통해진빈솔,설계료기우압전도자구동적쾌속반사경삼자유도유성지탱.수선근거압전도자구동적쾌속반사경대유성지탱적설계요구학정료유지탱간여지탱편조성적삼자유도사주식유성지탱방안,재이용압간은정성이론여변형능법대지탱간여지탱편진행삼수설계,최후이용workbench대설계결과진행분석.유한원분석결과표명,직경1 mm、장도8 mm적유성지탱간적응용가이사압전도자적전절위이감소86.7%,유성지탱편적응용사반사경일계모태위축향평이진동,해진빈솔위360 Hz ,이삼계모태위반사경량축편파진동,해진빈솔위420 Hz ,이고계모태재1 000 Hz이상.삼자유도유성지탱가이유효방지압전도자수도전절파배,제고쾌속반사경결구해진빈솔,유리우제고계통폐배대관.
Three DOFs elastic support for fast steering mirror driven by piezoelectric is designed in order to effectively absorb the lateral deviation of driving point caused by tilting of mirror, protect the piezoelectric drivers, restrain the DOF in non-working direction and enhance the frequency resonance of system. Firstly the scheme of all-around elastic support which consists of flexure ring and flexure staff was determined according to requirements of fast steering mirror driven by piezoelectric design. Secondly flexure ring and flexure staff was designed separately based on the buckling theory and energy theory. Finally the design was analyzed with FEA software workbench. The FEA analysis shows that the sheer displacement of piezoelectric decreases 86.7% with the application of 8 mm length and 1mm diameter flexure staff. In addition, the application of flexure ring turns the axial translation vibration into the first-order mode with resonance frequency of 340 Hz,turns the swing vibration into the second and the third order mode with resonance frequency of 420 Hz and the higher-order resonance frequency is more than 1 000 Hz. The three DOFs elastic support can prevent piezoelectric from sheering damage and help to enhance the resonance frequency of fast steering mirror system, which does help to enhancing the close-loop bandwidth of the system.
