CAJ | 학술논문

对一种具有抗静电反红外且在可见及近红外高透过的滤光片进行了研究.采用诱导滤光片的设计理论讨论了膜层厚度及薄膜常数对滤光片透射率及反射区的影响规律,采用离子束辅助沉积方式和磁控溅射的方式对设计膜系进行了制备工艺研究,重点讨论了不同工艺条件下金属层的薄膜常数的变化规律及其对滤光片性能的影响.最终设计的滤光片在750~850 nm谱段具有高达90%以上的透过率、2 500 nm以后谱段反射率高达90%,表面电阻小于300Ω,该滤光片具有很好的抗静电及反红外性能.
대일충구유항정전반홍외차재가견급근홍외고투과적려광편진행료연구.채용유도려광편적설계이론토론료막층후도급박막상수대려광편투사솔급반사구적영향규률,채용리자속보조침적방식화자공천사적방식대설계막계진행료제비공예연구,중점토론료불동공예조건하금속층적박막상수적변화규률급기대려광편성능적영향.최종설계적려광편재750~850 nm보단구유고체90%이상적투과솔、2 500 nm이후보단반사솔고체90%,표면전조소우300Ω,해려광편구유흔호적항정전급반홍외성능.
In order to design one special filter with wide-refection, ZnS and Ag film was chosen as the layers based on the induced transmission filter. The ZnS layers were deposited by Ion Beam Assisted Deposition (IBAD) and treated using ion source deposition, and the Ag layer was deposited by magnetron sputtering. The rate of Ag film with different working parameter was discussed in this paper. At last, the best working parameters were chosen and deposited the induced transmission filter. The results indicate that it has over 90 percents of transmission from 750 nm to 850 nm and more than 90 percents of reflection from 2 500 nm, and the face-resistence is less than 300Ω. The filter has a good reflection infrared and anlistatig character.