当代化工
噹代化工
당대화공
Contemporary Chemical Industry
2015年
10期
2363-2364
,共2页
彭立培%黄亚%王占卫%张长金
彭立培%黃亞%王佔衛%張長金
팽립배%황아%왕점위%장장금
磷烷%性质%应用%合成方法
燐烷%性質%應用%閤成方法
린완%성질%응용%합성방법
Phosphine%Property%Application%Synthesis methods
磷烷是半导体制备工艺中不可缺少的气体。介绍了磷烷的性质、应用及制备方法，根据不同的制备工艺对其合成方法进行了分类评析，指出了各种制备方法的优缺点。综合各方法的特点，指出了今后制备磷烷的方向。
燐烷是半導體製備工藝中不可缺少的氣體。介紹瞭燐烷的性質、應用及製備方法，根據不同的製備工藝對其閤成方法進行瞭分類評析，指齣瞭各種製備方法的優缺點。綜閤各方法的特點，指齣瞭今後製備燐烷的方嚮。
린완시반도체제비공예중불가결소적기체。개소료린완적성질、응용급제비방법，근거불동적제비공예대기합성방법진행료분류평석，지출료각충제비방법적우결점。종합각방법적특점，지출료금후제비린완적방향。
Phosphine is an indispensable gas in preparation process of semiconducting materials. In this paper, properties and application of phosphine were introduced,and various synthesis methods were compared and evaluated, their merits and drawbacks were pointed out. At last, the future research directions were proposed.
