CAJ | 학술논문

以氢气和正硅酸乙酯为反应源,采用前驱体裂解的方法在硬质合金基体上制备非晶SiO2(a-SiO2)薄膜.X射线衍射(XRD)分析表明,非晶薄膜与基体发生反应,并在界面上形成硅钴化合物.此外,透射电镜(TEM)表征表明,该薄膜由微米级的空心球团状的非晶 SiO2颗粒构成.随后,将非晶 SiO2薄膜作为过渡层,采用热丝化学气相沉积技术在过渡层上沉积金刚石涂层.通过压痕试验表征制备获得的金刚石?非晶SiO2复合涂层对硬质合金基体的附着力.通过加工玻璃丝纤维增强塑料(GFRP)表征该复合涂层的切削性能.结果表明,非晶 SiO2过渡层可以有效地改善金刚石涂层对硬质合金基体的附着力.此外,非晶SiO2过渡层的厚度对金刚石涂层附着力的提升效果有很大影响.
이경기화정규산을지위반응원,채용전구체렬해적방법재경질합금기체상제비비정SiO2(a-SiO2)박막.X사선연사(XRD)분석표명,비정박막여기체발생반응,병재계면상형성규고화합물.차외,투사전경(TEM)표정표명,해박막유미미급적공심구단상적비정 SiO2과립구성.수후,장비정 SiO2박막작위과도층,채용열사화학기상침적기술재과도층상침적금강석도층.통과압흔시험표정제비획득적금강석?비정SiO2복합도층대경질합금기체적부착력.통과가공파리사섬유증강소료(GFRP)표정해복합도층적절삭성능.결과표명,비정 SiO2과도층가이유효지개선금강석도층대경질합금기체적부착력.차외,비정SiO2과도층적후도대금강석도층부착력적제승효과유흔대영향.
Amorphous SiO2 (a-SiO2) films were synthesized on WC?Co substrates with H2 and tetraethoxysilane (TEOS) via pyrolysis of molecular precursor. X-ray diffraction (XRD) pattern shows that silicon?cobalt compounds form at the interface between a-SiO2 films and WC?Co substrates. Moreover, it is observed by transmission electron microscope (TEM) that the a-SiO2 films are composed of hollow mirco-spheroid a-SiO2 particles. Subsequently,the a-SiO2 films are used as intermediate films and chemical vapor deposition (CVD) diamond films are deposited on them. Indentation tests were performed to evaluate the adhesion of bi-layer (a-SiO2 + diamond) films on cemented carbide substrates. And the cutting performance of bi-layer (a-SiO2 + diamond) coated inserts was evaluated by machining the glass fiber reinforced plastic (GFRP). The results show that a-SiO2 interlayers can greatly improve the adhesive strength of diamond films on cemented carbide inserts; furthermore, thickness of the a-SiO2 interlayers plays a significant role in their effectiveness on adhesion enhancement of diamond films.