CAJ | 학술논문

研究4种不同气氛下制备的可应用于 MEMS 方面的超纳米金刚石薄膜的显微力学特征。利用纳米压痕技术得到样品的加载?卸载曲线及硬度和弹性模量随压入深度的变化关系。结果表明，无Ar条件下制备的薄膜具有最好的弹性回复能力、最高的硬度(72.9 GPa)和弹性模量(693.7 GPa)。同时低Ar含量更有利于提高薄膜的硬度和弹性模量。以上结果说明无Ar或低Ar含量更有利于提高纳米金刚石薄膜的力学性能，以更好地应用于MEMS方面。
연구4충불동기분하제비적가응용우 MEMS 방면적초납미금강석박막적현미역학특정。이용납미압흔기술득도양품적가재?사재곡선급경도화탄성모량수압입심도적변화관계。결과표명，무Ar조건하제비적박막구유최호적탄성회복능력、최고적경도(72.9 GPa)화탄성모량(693.7 GPa)。동시저Ar함량경유리우제고박막적경도화탄성모량。이상결과설명무Ar혹저Ar함량경유리우제고납미금강석박막적역학성능，이경호지응용우MEMS방면。
The microscopic mechanical characteristics of ultranano-crystalline diamond films which were prepared in four different atmospheres were investigated for the applications in microelectron-mechanical system (MEMS). The loading?unloading curves and the change of modulus and hardness of samples along with depth were achieved through nanoindenter. The results show that the films which are made in atmosphere without Ar have the highest recovery of elasticity, hardness (72.9 GPa) and elastic modulus (693.7 GPa) among the samples. Meanwhile, samples fabricated at a low Ar content have higher hardness and modulus. All the results above demonstrate that atmosphere without Ar or low Ar content leads to better mechanical properties of nanodiamond films that are the candidates for applications in MEMS.