金刚石与磨料磨具工程
金剛石與磨料磨具工程
금강석여마료마구공정
Diamond & Abrasives Engineering
2015年
5期
63-66,71
,共5页
惠珍%丁玉龙%丁春生%李少杰%熊华军%叶腾飞
惠珍%丁玉龍%丁春生%李少傑%熊華軍%葉騰飛
혜진%정옥룡%정춘생%리소걸%웅화군%협등비
自锐金刚石%砂轮%硅片%砂轮磨损%表面质量
自銳金剛石%砂輪%硅片%砂輪磨損%錶麵質量
자예금강석%사륜%규편%사륜마손%표면질량
self-sharpening diamond%grinding wheel%silicon wafer%wheel wear%surface quality
通过磨削试验，从主轴电流、齿高磨损、磨削工件表面质量等方面，研究了单晶、自锐1＃、自锐2＃金刚石对工件磨削性能的影响。研究结果表明：在各磨削参数相同的条件下，自锐2＃金刚石树脂砂轮的工作电流最稳定且最小，砂轮齿高磨损最少，硅片磨削表面质量与另外两种金刚石砂轮相差不大。自锐2＃金刚石树脂砂轮总体磨削性能最佳。
通過磨削試驗，從主軸電流、齒高磨損、磨削工件錶麵質量等方麵，研究瞭單晶、自銳1＃、自銳2＃金剛石對工件磨削性能的影響。研究結果錶明：在各磨削參數相同的條件下，自銳2＃金剛石樹脂砂輪的工作電流最穩定且最小，砂輪齒高磨損最少，硅片磨削錶麵質量與另外兩種金剛石砂輪相差不大。自銳2＃金剛石樹脂砂輪總體磨削性能最佳。
통과마삭시험，종주축전류、치고마손、마삭공건표면질량등방면，연구료단정、자예1＃、자예2＃금강석대공건마삭성능적영향。연구결과표명：재각마삭삼수상동적조건하，자예2＃금강석수지사륜적공작전류최은정차최소，사륜치고마손최소，규편마삭표면질량여령외량충금강석사륜상차불대。자예2＃금강석수지사륜총체마삭성능최가。
The influence of monocrystalline and self‐sharpening diamonds on the grinding performance was studied from mainly three aspects , namely spindle current , wheel wear , and surface quality of ground work piece . The research results showed that grinding performance of self‐sharpening 2# diamond outperformed those of the other two kinds of diamonds on stability of working current , wheel wear , with same surface quality of ground wafer . It demonstrated that the overall performance of self‐sharpening 2# diamond was the best among the three .
